Vertical wide-range high-precision optical plane testing device

An optical plane and testing device technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of large influence of measurement results, high equipment processing requirements, and achieve the effects of light weight, reduced testing environment requirements, and high precision.

Inactive Publication Date: 2013-01-09
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
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  • Application Information

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Problems solved by technology

Existing measurement methods have high requirements for equipment processi...

Method used

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  • Vertical wide-range high-precision optical plane testing device
  • Vertical wide-range high-precision optical plane testing device
  • Vertical wide-range high-precision optical plane testing device

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Embodiment Construction

[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0019] like image 3 As shown, the vertical large-scale high-precision optical plane testing device of the present invention includes: four lifting legs 9, a supporting base 10, a horizontal turntable 11, a counterweight 12, a vertical precision turntable 13, a connecting shaft 14, and a long guide rail Carrier plate 15, the first pentaprism 16, the second pentaprism 17, the first Hardemann wavefront tester 18 with self-collimating light source, the second Hardemann wavefront tester 19 with self-collimating light source, Long guide rail 20, electric control system 23 and data acquisition and analysis system 22; four lifting legs 9 are evenly distributed at the four corners of the support base 10, the horizontal turntable 11 is placed on the support base 10, and the vertical precision turntable 13 Placed on the horizontal turntable 11, the counterweight 12 is...

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Abstract

The invention provides a vertical wide-range high-precision optical plane testing device, and belongs to the technical field of research of optical testing instruments. The vertical wide-range high-precision optical plane testing device comprises lifting support legs, a supporting base table, a horizontal rotating table, a balance weight, a precision rotating table, a connecting shaft, a long guide track loading board, two reflectors, a first angle measuring device, a second angle measuring device, a long guide track, an electronic control system and a data acquiring and analyzing system, wherein the two reflectors move on the long guide track in an equally spaced manner; the angle change value between testing points is obtained through the two angle measuring devices; the angle change value is multiplied by a space distance to obtain height change value between the testing points, so that the contour shapes of the planar reflectors in the direction are measured; and the contour shapes of the planar reflectors are tested in different directions by the precision rotating table, and finally, an integral and full-aperture surface-shape contour diagram of each planar reflector can be obtained by analyzing and calculating tested data. The surface shapes of the large-aperture optical planar reflectors can be corrected and monitored during use, the vertical wide-range high-precision optical plane testing device is low in sensitiveness to a testing environment, and high testing precision can be realized.

Description

technical field [0001] The invention belongs to the research field of optical testing instruments, and relates to a vertical large-scale high-precision optical plane testing device, which is used for testing the shape of a large-diameter plane mirror. Background technique [0002] The inspection of the wavefront of the optical imaging system is an important means of imaging quality inspection of the optical system. The optical imaging system of the high-resolution visible light imaging reconnaissance camera has an aperture of more than 1.0m. When using the self-collimation method to detect the wavefront of the optical system (horizontal optical axis), it is necessary to retest and monitor the surface shape of the vertical large-aperture plane mirror, while the existing method requires an interferometer and a reference plane mirror to detect the optical plane mirror. At present, there is no interferometer that can meet the test requirements for this type of large-aperture op...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 马冬梅宋立维王涛
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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