Vertical wide-range high-precision optical plane testing device

Abstract

The invention provides a vertical wide-range high-precision optical plane testing device, and belongs to the technical field of research of optical testing instruments. The vertical wide-range high-precision optical plane testing device comprises lifting support legs, a supporting base table, a horizontal rotating table, a balance weight, a precision rotating table, a connecting shaft, a long guide track loading board, two reflectors, a first angle measuring device, a second angle measuring device, a long guide track, an electronic control system and a data acquiring and analyzing system, wherein the two reflectors move on the long guide track in an equally spaced manner; the angle change value between testing points is obtained through the two angle measuring devices; the angle change value is multiplied by a space distance to obtain height change value between the testing points, so that the contour shapes of the planar reflectors in the direction are measured; and the contour shapes of the planar reflectors are tested in different directions by the precision rotating table, and finally, an integral and full-aperture surface-shape contour diagram of each planar reflector can be obtained by analyzing and calculating tested data. The surface shapes of the large-aperture optical planar reflectors can be corrected and monitored during use, the vertical wide-range high-precision optical plane testing device is low in sensitiveness to a testing environment, and high testing precision can be realized.

Description

technical field [0001] The invention belongs to the research field of optical testing instruments, and relates to a vertical large-scale high-precision optical plane testing device, which is used for testing the shape of a large-diameter plane mirror. Background technique [0002] The inspection of the wavefront of the optical imaging system is an important means of imaging quality inspection of the optical system. The optical imaging system of the high-resolution visible light imaging reconnaissance camera has an aperture of more than 1.0m. When using the self-collimation method to detect the wavefront of the optical system (horizontal optical axis), it is necessary to retest and monitor the surface shape of the vertical large-aperture plane mirror, while the existing method requires an interferometer and a reference plane mirror to detect the optical plane mirror. At present, there is no interferometer that can meet the test requirements for this type of large-aperture op...

AI Technical Summary

Problems solved by technology

Existing measurement methods have high requirements for equipment processing, and environmental disturbances have a great influence on measurement results

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