Micro-positioner of vertical decoupling gravity compensator provided with corrugated pipe

Abstract

The invention provides a micro-positioner of a vertical decoupling gravity compensator provided with a corrugated pipe and belongs to the technical field of semiconductor manufacturing devices. The corrugated pipe is configured at the top of the gravity compensator to achieve vertical decoupling of the micro-positioner, support spring pieces formed by three identical flat springs are symmetrically configured at the top of a vertical voice coil motor active cell steel magnet relative to the axis, and a water-cooling annular cavity is arranged between a base and the vertical voice coil motor stator coil and is provided with a cooling water and compressed air temperature homogenizing device. The micro-positioner has the advantages of being simple in structure, easy to process, capable of releasing thermal expansion stress of a motor active cell, carrying away heat produced by a motor and restraining temperature rise, and simultaneously can homogenize the temperature of cooling water and the temperature of compressed air, eliminate the compressed air temperature rise caused by cable heat in parallel layout of air channels and cables, facilitate restraining of temperature fluctuation under the micro-positioner microenvironment and ensure external severe constant temperature environment.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and mainly relates to a micro-motion stage equipped with a bellows vertical decoupling gravity compensator. Background technique [0002] Lithography machine is one of the important ultra-precision equipment in the manufacture of very large scale integrated circuits. The resolution, engraving accuracy, and productivity of lithography machines have always been the three major performance indicators of lithography machines that people are pursuing. As one of the three core technologies of lithography machines, the technology of lithography machine workpiece table is very important for improving the above indicators of lithography machines. very important. As the core component of the lithography machine, the workpiece table system is mainly tasked to realize ultra-precise motion control of high speed and high acceleration and deceleration, that is, to have nanometer p...

AI Technical Summary

Problems solved by technology

[0005] In the above-mentioned existing gravity compensator scheme, ball head air bearings are used for vertical decoupling, which has the common problem of difficult processing and detection, and the biaxial flexible hinge will cause low reliability under continuous high-speed working conditions due to stress concentration

At the same time, none of the above solutions considered the problem of temperature control of the gravity compensator, which needs to be improved

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