Anodizing device, treatment tank, method for producing roll-shaped mold for imprinting, and method for producing article having plurality of protruding parts on surface
An anodic oxidation tank and manufacturing method technology, applied in anodic oxidation, surface reaction electrolytic coating, semiconductor/solid-state device manufacturing, etc., can solve problems such as poor power supply, uneven surface temperature of roll-shaped aluminum, etc.
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Embodiment 1
[0334] A hollow cylindrical aluminum substrate (purity: 99.99%, length: 280mm, outer diameter: 200mm, inner diameter: 155mm) is subjected to fabric grinding treatment, followed by perchloric acid / ethanol mixed solution (volume ratio = 1 / 4) It is electrolytically polished.
[0335] Next, use Figure 15 In the anodizing treatment device shown, in a 107L electrolyte solution composed of 0.3M oxalic acid aqueous solution, bath temperature: 15.7°C, DC: 40V, electrolyte supply rate: 41L / min, peripheral speed of the aluminum substrate: The aluminum substrate was anodized for 30 minutes under the condition of 3.8 m / min to form an oxide film (step (a)).
[0336] Temporarily dissolve and remove the formed oxide film in a mixed aqueous solution of 6% by mass phosphoric acid and 1.8% by mass of chromic acid (step (b)), and then perform anodic oxidation again under the same conditions as in step (a) for 45 seconds, An oxide film is formed (step (c)).
[0337] Thereafter, a pore-diameter...
Embodiment 2
[0360] In this example 2, for Figure 10 The illustrated anodizing treatment apparatus 210 is operated under specific conditions. The taper angle with respect to the axial direction of the two end faces of the hollow cylindrical aluminum substrate 220 (purity: 99.99%, length: 280 mm, outer diameter: 200 mm, inner diameter: 155 mm) and the end face of the current-carrying member 213 is set to 30°. , the surface roughness of each tapered surface 220A, 213A is set to Ra1.6.
[0361] In a 106L electrolyte solution composed of a 0.3mol / L aqueous solution, bath temperature: 15.7°C, electrolyte solution supply rate: 36L / min, pressing pressure of the two electrification members 213: 0.2MPa, circumference of the aluminum substrate 220 Under the condition of speed: 3.8m / min, and the condition of voltage: 40V, the aluminum substrate 220 was anodized for 60 minutes to form an oxide film.
[0362] exist Figure 12A In the figure, the experimental example (graph) which actually detected ...
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