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Manufacturing method of roll mold for imprint

A manufacturing method and mold technology, which can be used in semiconductor/solid-state device manufacturing, anodizing, electrolytic coatings, etc., and can solve problems such as poor electricity supply and uneven surface temperature of roll-shaped aluminum.

Active Publication Date: 2015-10-21
MITSUBISHI CHEM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0018] As the cause of uneven anodization, the temperature of the electrolyte, current density, electrolysis voltage, etc. will have an influence, and it may be that the surface temperature of the roll-shaped aluminum is uneven, and the current-carrying member for supplying a stable current is not in close contact with the aluminum substrate. Poor power supply due to ground contact

Method used

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  • Manufacturing method of roll mold for imprint
  • Manufacturing method of roll mold for imprint
  • Manufacturing method of roll mold for imprint

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0334] A hollow cylindrical aluminum substrate (purity: 99.99%, length: 280mm, outer diameter: 200mm, inner diameter: 155mm) is subjected to fabric grinding treatment, followed by perchloric acid / ethanol mixed solution (volume ratio = 1 / 4) It is electrolytically polished.

[0335] Next, use Figure 15 In the anodizing treatment device shown, in a 107L electrolyte solution composed of 0.3M oxalic acid aqueous solution, bath temperature: 15.7°C, DC: 40V, electrolyte supply rate: 41L / min, peripheral speed of the aluminum substrate: The aluminum substrate was anodized for 30 minutes under the condition of 3.8 m / min to form an oxide film (step (a)).

[0336] Temporarily dissolve and remove the formed oxide film in a mixed aqueous solution of 6% by mass phosphoric acid and 1.8% by mass of chromic acid (step (b)), and then perform anodic oxidation again under the same conditions as in step (a) for 45 seconds, An oxide film is formed (step (c)).

[0337] Thereafter, a pore-diameter...

Embodiment 2

[0360] In this example 2, for Figure 10 The illustrated anodizing treatment apparatus 210 is operated under specific conditions. The taper angle with respect to the axial direction of the two end faces of the hollow cylindrical aluminum substrate 220 (purity: 99.99%, length: 280 mm, outer diameter: 200 mm, inner diameter: 155 mm) and the end face of the current-carrying member 213 is set to 30°. , the surface roughness of each tapered surface 220A, 213A is set to Ra1.6.

[0361] In a 106L electrolyte solution composed of a 0.3mol / L aqueous solution, bath temperature: 15.7°C, electrolyte solution supply rate: 36L / min, pressing pressure of the two electrification members 213: 0.2MPa, circumference of the aluminum substrate 220 Under the condition of speed: 3.8m / min, and the condition of voltage: 40V, the aluminum substrate 220 was anodized for 60 minutes to form an oxide film.

[0362] exist Figure 12A In the figure, the experimental example (graph) which actually detected ...

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Abstract

Disclosed is a method for producing a roll-shaped mold having a plurality of protuberances and recesses on the surface of same, in which a cylindrical aluminum base material, comprising aluminum immersed in an electrolysis solution in an anodizing tank, is anodized by electrification using an electrifying member. Furthermore, the method for producing a roll-shaped mold includes an anodizing step, in which, when the aforementioned aluminum base material is in contact with the aforementioned electrifying member, the aforementioned aluminum base material is electrified using the aforementioned electrifying member, while rotating the aforementioned aluminum base material with the central axis of the aforementioned aluminum base material as the axis of rotation.

Description

technical field [0001] The present invention relates to an anodizing treatment device, a method for manufacturing a roll mold for imprinting, and a method for manufacturing an object having a plurality of protrusions on the surface using the roll mold for imprinting. The anodizing treatment device is used for A roll-shaped mold for imprinting in which anodized aluminum having a plurality of fine pores is formed on the outer peripheral surface of a roll-shaped aluminum substrate was manufactured. [0002] In addition, the present invention relates to a treatment tank for electrolytically treating a columnar substrate in an electrolytic solution, and an electrolytic treatment device for electrolytically treating a columnar substrate in an electrolytic solution. [0003] The present invention is based on Japanese Patent Application No. 2010-070280 filed in Japan on March 25, 2010, Japanese Patent Application No. 2010-136227 filed in Japan on June 15, 2010, and proposed in Japan o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D11/04B29C33/38B29C59/04H01L21/027B29C33/42C25D11/00C25D21/00G02B1/11G02B1/118
CPCC25D11/04B29C33/62B29C33/64C25D11/005
Inventor 松原雄二镰田正俊释迦郡真矢广幡实男星出芳彦小畑博司小岛克宏河内秀树
Owner MITSUBISHI CHEM CORP
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