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Manufacturing method of through hole structure in PDMS (polydimethylsiloxane) microfluidic device

A technology of a microfluidic device and a manufacturing method, which is applied in the directions of microstructure technology, microstructure device, manufacturing microstructure device, etc., can solve the problems of increasing the complexity of the manufacturing process and the manufacturing cost, and achieves low cost, wide selection range, and manufacturing. Ease of the process

Inactive Publication Date: 2015-05-20
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Generally speaking, in order to effectively form through holes in the prior art, either additional devices or additional special processes are required, which increases the complexity and cost of the manufacturing process

Method used

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  • Manufacturing method of through hole structure in PDMS (polydimethylsiloxane) microfluidic device
  • Manufacturing method of through hole structure in PDMS (polydimethylsiloxane) microfluidic device
  • Manufacturing method of through hole structure in PDMS (polydimethylsiloxane) microfluidic device

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Experimental program
Comparison scheme
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Embodiment 1

[0021] like figure 1 Shown, the fabrication method of the elongated through hole in the PDMS microfluidic device of the present invention, comprises the following steps:

[0022] 1) if figure 1 As shown in a, a mold 1 is produced, and the mold 1 contains a plurality of elongated protrusions 2 corresponding to the through holes to be manufactured, and each elongated protrusion 2 is distributed in parallel, with a width of 100 μm and a height of 100 μm. The distance between each elongated protrusion 2 is 100 μm.

[0023] 2) if figure 1 As shown in b, the mold 1 is placed horizontally, and the PDMS prepolymer 3 is slowly injected from the side of the mold 1 using a syringe or other liquid injection tools. The PDMS prepolymer 3 is composed of PDMS monomer and curing agent with a mass ratio of 10:1 mixed. The PDMS prepolymer 3 gradually wets the surface of the mold 1 and extends along the gaps between the elongated protrusions 2 under the action of capillary force. Due to the ...

Embodiment 2

[0028] like figure 2 Shown, the fabrication method of highly integrated cylindrical through hole in the PDMS microfluidic device of the present invention, comprises the following steps:

[0029] 1) if figure 2 As shown in a, at first the mold 1 is made, and the mold 1 contains cylindrical protrusions 5 corresponding to the required through-holes, and each cylindrical protrusion 5 is vertically arranged in a matrix, and the diameter of each cylindrical protrusion 5 is 150 μm, the height is 200 μm, and the minimum distance between two adjacent cylindrical protrusions 5 is 50 μm.

[0030] 2) if figure 2 As shown in b, place the mold 1 horizontally, slowly inject PDMS prepolymer 3 from one side of the mold 1; Gap extension.

[0031] 3) if figure 2 As shown in c, after the PDMS prepolymer 3 fills the gaps of the cylindrical bosses 5 , a proper amount of PDMS prepolymer 3 is added to the edge of the mold so that the liquid level is flush with the upper surface of the cylind...

Embodiment 3

[0037] The invention can make a through-hole structure connecting different microchannel layers in the PDMS microfluidic device, and further constitute a device containing multilayer channels. like image 3 As shown, two PDMS through-hole layers 4 made by embodiment 1 are respectively used as an upper microchannel layer and a lower microchannel layer, and the PDMS through-hole layer 6 made by embodiment 2 is used as an intermediate layer. The three-layer structure is aligned and bonded twice, that is, it is made into a two-layer microchannel structure connected up and down, wherein the cylindrical through-hole in the PDMS through-hole layer 6 plays a role in connecting the upper and lower two-layer microchannels. Above and below the two-layer microchannel structure, if other PDMS layers or glass layers are bonded, complex microfluidic devices containing more layers of microchannel structures can also be fabricated.

[0038] Summing up the above-mentioned embodiments, it can b...

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Abstract

The invention relates to a manufacturing method of a through hole structure in a PDMS (polydimethylsiloxane) microfluidic device. The manufacturing method comprises the following steps of: injecting a PDMS prepolymer into the edge of a well-prepared die containing convex columns; enabling the shape and the size of the convex columns to be consistent with the shape and the size of through holes in a through hole layer to be prepared, wherein the heights of the convex columns are consistent with that of the through hole layer to be obtained; and slowly and smoothly infiltrating the PDMS prepolymer into gaps between the convex columns by utilizing the action of capillary force to till the whole die is fully spread, curing and then forming the PDMS through hole layer. The manufacturing method disclosed by the invention has the advantages of simplicity and convenience in operation, capability of effectively ensuring the completely through property of the holes, smooth surface of the through hole layer and a wide selection range of die materials, and can be widely used in the manufacturing process of the through hole structures in the PDMS microfluidic devices.

Description

technical field [0001] The invention relates to a method for manufacturing a microstructure, in particular to a method for manufacturing a through-hole structure in a polydimethylsiloxane microfluidic device. Background technique [0002] In recent years, the research on microfluidic devices has developed rapidly, and the design and functions of devices have been continuously innovated. Among them, devices with a multilayer microchannel structure can construct more complex structures and realize more diverse functions than the current conventional single-layer structure devices, which will greatly expand the application range of devices and enhance their performance. performance. The materials for making microfluidic devices mainly include silicon, glass, quartz, and polymers, among which polydimethylsiloxane (PDMS) is easy to mold, cheap, durable and chemically inert. It has been widely used in the research of microfluidic devices due to its advantages of good compatibili...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00
Inventor 李勇朱效谷周凯
Owner TSINGHUA UNIV
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