Method of measuring surface roughness by using confocal laser scanning microscope

A technology of confocal microscopy and surface roughness, which is applied in the field of physical performance inspection of metal materials, can solve the problems that the 3D shape of the measured surface cannot be given, and achieve the effect of consistency and traceability

Active Publication Date: 2013-02-13
SHOUGANG CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Solve the problem that the 3D shape of the measured surface cannot be given in the traditional method

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] This embodiment is the roughness measurement of the machined end-milled low-magnification acid leaching sample. The specific technical steps are:

[0033] 1. Place the standard sample block on the stage. The standard sample block is a sample block that is close to the surface roughness of the predicted sample by visual observation. In this embodiment, the end milling Ra3.20 μm standard sample block is selected;

[0034] 2. Select a 5x objective lens, adjust the coarse focus knob, and observe the surface topography image in the TV state; turn off the TV and turn on the CF state, and set the laser light intensity to 70% of the full range to ensure that the real image is obtained. The image will not be too dark or too bright to cover up some image details and distort the image appearance. Roll the mouse up to make the image completely black, set the upper limit of scanning in the Z direction, the upper limit is higher than the highest point of the bump on the surface of t...

Embodiment 2

[0046] This embodiment is the measurement of the roughness of the low-magnification sulfur printing sample after machining and grinding. The specific technical steps are:

[0047] 1. Place the standard sample block on the stage. The standard sample block is a sample block that is close to the surface roughness of the predicted sample by visual observation. The Ra0.8 μm standard sample block is selected in this embodiment;

[0048] 2. Select a 10x objective lens, adjust the coarse focus knob, and observe the surface topography image in the TV state; turn off the TV and turn on the CF state, and set the laser light intensity to 80% of the full range to ensure that the real image is obtained. The image will not be too dark or too bright to cover up some image details and distort the image shape. Roll the mouse up to make the image completely black. Set the Z-direction scanning upper limit. The upper limit is higher than the highest point of the standard sample surface bump, click...

Embodiment 3

[0060] This embodiment is the roughness measurement of a sample cut by a machined band saw. The specific technical steps are:

[0061] 1. Place the standard sample block on the stage. The standard sample block is a sample block that is close to the surface roughness of the predicted sample by visual observation. In this embodiment, the end milling Ra6.3 μm standard sample block is selected;

[0062] 2. Select a 5x objective lens, adjust the coarse focus knob, and observe the surface topography image in the TV state; turn off the TV and turn on the CF state, and set the laser light intensity to 70% of the full range to ensure that the real image is obtained. The image will not be too dark or too bright to cover up some image details and distort the image appearance. Roll the mouse up to make the image completely black, set the upper limit of scanning in the Z direction, the upper limit is higher than the highest point of the bump on the surface of the standard sample, click th...

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Abstract

The invention relates to a method of measuring the surface roughness by using a confocal laser scanning microscope, which belongs to the technical field of the physical performance examination on metal materials. According to the method, through the technical steps of measurement on a standard sample block, measurement on a to-be-measured sample and the like, the problem that the 3D (Three-Dimensional) shape of a to-be-measured surface can not be obtained in the traditional method. The method has the advantages that the a non-contact mode is realized, the surface can not be damaged, the sample can be put without requirements on directivity, the 3D image microstructure of the surface can be displayed clearly and directly, and especially, calibrating procedures on the standard sample block are conducted in a simple and reliable mode so as to keep measurement results of samples to be consistent and traceable.

Description

technical field [0001] The invention belongs to the technical field of metal material physical performance inspection. In particular, it relates to a method for measuring surface roughness with a laser scanning confocal microscope. Background technique [0002] Surface roughness is an important index to evaluate the surface quality of workpieces, and it is an important parameter to determine the performance and quality of workpieces. Surface roughness refers to the micro-geometric shape characteristics composed of tiny spacing and peaks and valleys on the surface of the processed workpiece. Not only the workpiece obtained by machining requires a quantitative description of the surface micro-geometric shape, but also the galvanized sheet The zinc layer also has corresponding surface roughness requirements. [0003] In the traditional measurement technology, the measurement of surface roughness has the following several methods: roughness template comparison method, electric...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30
Inventor 尹立新刘卫平鞠新华任群刘晓岚付百林姚武刚杨瑞王泽阳苗雨芳
Owner SHOUGANG CORPORATION
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