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System and method capable of extending lower limit of gas micro-flow calibration to 10<-14> Pam<3>/s

A micro-flow, gas technology, applied in the field of measurement to achieve the effect of improving sensitivity

Inactive Publication Date: 2013-02-13
北京宏宇永达科技发展有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the minimum detectable leak rate of commercial leak detectors reaches 10. -16 Pam 3 / s, for which the gas flow rate is less than 10 -12 Pam 3 / s calibration is an unresolved problem

Method used

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  • System and method capable of extending lower limit of gas micro-flow calibration to 10&lt;-14&gt; Pam&lt;3&gt;/s
  • System and method capable of extending lower limit of gas micro-flow calibration to 10&lt;-14&gt; Pam&lt;3&gt;/s
  • System and method capable of extending lower limit of gas micro-flow calibration to 10&lt;-14&gt; Pam&lt;3&gt;/s

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Experimental program
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Effect test

Embodiment 1

[0049] (1) Connect the measured gas micro-flow rate (vacuum leak) to the fourth vacuum valve 17, and check the tightness, then close the fourth vacuum valve 17;

[0050] (2) Turn on the first mechanical pump 1 and the second mechanical pump 14 of the machine, and then open the first electrovalve valve 2, the first vacuum valve 4, the second vacuum valve 7, the third vacuum valve 11, and the second electromagnetic valve 13 pairs The mass spectrometry chamber 5 and the valve pipeline are evacuated, and the second vacuum gauge 15 is opened. When the measured value of the second vacuum gauge 15 is less than 10 Pa (1.2Pa), the first molecular pump 3 and the second molecular pump 12 are turned on to evacuate to maintain the environment. The temperature is 23±3°C (23±0.5°C);

[0051] (3) Open the first vacuum gauge 9 when the gas pressure in the plenum 10 is less than 1Pa (0.1Pa), and the vacuum degree in the plenum 10 is less than 1×10 -4 Pa(6.2×10 -5 Pa) when opening the fifth va...

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Abstract

The invention relates to a system and a method capable of extending the lower limit of gas micro-flow calibration to 10<-14> Pam<3> / s, which are used for the calibration and the test on vacuum holes, a leak detector and a gas micro-flowmeter. The system comprises a mechanical pump, two solenoid valves, six vacuum valves, two molecular pumps, a mass spectrum analysis chamber, a small hole, two degasifier pumps, a pressure stabilizing chamber, three vacuum gauges, a gas bomb, a micrometering valve and a quadrupole mass spectrometer, wherein the degasifier pumps are adopted to pump the pressure stabilizing chamber so as to eliminate the influence on the pressure measurement caused by non-inert gas released by the wall of the pressure stabilizing chamber, a magnetic floating rotor gauge is adopted to accurately measure the gas pressure P in the pressure stabilizing chamber, the gas in the pressure stabilizing chamber is input into the mass spectrum analysis chamber through the continuous expansion of the existing flow guiding hole, the calibration is realized by adopting an accumulation method, and the measurement and calibration technologies of the micro-flow of minimum gas within the scope being 10<-11>-10<-14> Pam<3> / s can be realized.

Description

technical field [0001] The invention belongs to the technical field of measurement, and in particular relates to a very small gas flow calibration system and method, which are used for the calibration and measurement of vacuum leaks, leak detectors and gas micro flow meters. Background technique [0002] Leakage detection is a key technology in application fields such as aerospace engineering, semiconductor industry, and solar energy industry. Especially in aerospace engineering, there is an urgent demand for extremely small gas flow. The document "Development of Measurement and Control System for Constant-pressure Gas Micro-Flow Meter "Aerospace Measurement Technology" Volume 24, Issue 6, 2004, Pages 14-16", introduces and proposes the method of measuring gas micro-flow by constant pressure method, Its measuring range is 3.9×10 -4 ~3.6×10 -8 Pam 3 / s; Literature "Design of Portable Gas Micro-Flow Meter, "Vacuum" Vol. 47, No. 2, 2010, Page 60-63", introduces and proposes ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/20G01F25/00
Inventor 卢耀文
Owner 北京宏宇永达科技发展有限公司
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