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Air-discharging sealing device and method for open quartz ampoule

A quartz ampoule and exhaust sealing technology, which is applied in post-processing devices, chemical instruments and methods, single crystal growth, etc., can solve problems such as low vacuum, large safety hazards, easy diffusion of impurity elements, etc., and achieve high vacuum , avoid direct contact, maintain the effect of purity

Active Publication Date: 2018-06-26
11TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Abstract
  • Description
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Problems solved by technology

[0007] In order to solve the problems of low vacuum degree of quartz ampoules, large potential safety hazards and easy diffusion of impurity elements in the prior art, the present invention provides an exhaust sealing device and method for open quartz ampoules

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  • Air-discharging sealing device and method for open quartz ampoule
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  • Air-discharging sealing device and method for open quartz ampoule

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Embodiment Construction

[0049] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0050] See Figure 1 ~ Figure 3 , in the first embodiment of the present invention, an exhaust sealing device for an open quartz ampoule is provided, including an exhaust sealing platform 2 and a heating furnace 3 arranged on a bottom plate 1, the exhaust sealing platform 2 includes a plurality of metal compression rings 211 and a plurality of sealing rings 212; the metal compression rings 211 and the sealing rings 212 are arranged...

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Abstract

The invention discloses an air-discharging sealing device and method for an open quartz ampoule. In the air-discharging sealing process of the quartz ampoule by adopting the air-discharging sealing device provided by the invention, the quartz ampoule can be guaranteed to have very good sealing and a high vacuum degree, the quartz ampoule is not broken due to the action of stress, at the same time,the quartz ampoule of which the inner surface is coated by a carbon film can effectively block impurity elements, so that the purity of a crystal material is maintained, and the direct contact of Cdand the quartz ampoule is avoided; and the device is safe and reliable, and the arranged carbon-free film contact area ensures that the quartz ampoule can be directly sealed.

Description

technical field [0001] The invention relates to the technical field of growing semiconductor materials, in particular to an exhaust sealing device and method for an open quartz ampoule. Background technique [0002] Cadmium zinc telluride CdZnTe is a compound semiconductor material with strong ionicity, which can be used as a radiation detector and a mercury cadmium telluride epitaxial substrate material. Due to the strong ionicity of the Cd-Te bond, low stacking fault energy, low critical shear stress, low thermal conductivity and other properties, its growth difficulty is much higher than that of group IV element semiconductor materials such as silicon and germanium, and gallium arsenide, etc. III-V compound semiconductor materials. [0003] CdZnTe crystal growth methods generally include melt growth method and vapor phase growth method. Vapor phase growth methods (physical vapor transport, chemical vapor transport, etc.) have low yields. For the growth of mercury cadmi...

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Application Information

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IPC IPC(8): C30B35/00C30B29/48
CPCC30B29/48C30B35/00
Inventor 徐强强吴卿范叶霞侯晓敏
Owner 11TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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