A Design Method of High Precision Adjustable Chip Resistor

Abstract

The invention discloses a designing method for a high-accuracy adjustable chip resistor. A plurality of conflictive technical indexes of miniaturization, high accuracy, resistance value range adjustability, high resistor stripe power consistency, convenience for resistance value trimming and the like during the manufacture of a chip resistor are integrally and comprehensively solved. The designing method for the high-accuracy adjustable chip resistor is theoretically based on a specified mathematical model. In terms of process design, Ra in the mathematical model is a lower limit value of actual process accuracy of a production line, R1 is a small fixed value, and the structure, shape and area of an R1 graph are required to meet the special requirements of laser trimming equipment on the mechanical positioning and trimming light spots of a trimming object. If high-accuracy R is required, R2 is required to be designed to be a half of an absolute error central value of R, and if the resistance value range of R is required to be wide, R2 can be designed into an absolute error value of R. In general, R2 is designed to be small if the accuracy of R is required to be high, and a value of n is great; and if the variation range of R is required to be wide, the value of n is great.

Description

technical field [0001] The invention discloses a high-precision adjustable chip resistance design method, which belongs to the technical field of microelectronic element design and process processing. Background technique [0002] The design and manufacture of chip resistors have a long history. A clear concept has been put forward since the invention of semiconductor integrated circuits. With the development and progress of microelectronics technology, chip resistors have become an indispensable part of various microcircuits and electronic control circuits. At the same time, various application fields also put forward various special requirements. Among them, miniaturization, high precision, wide-range adjustable resistance value, good power consistency of resistance strips, and easy adjustment of resistance value often trouble microelectronic chip design engineers, because these indicators are contradictory to each other. Miniaturization can be achieved through semiconduc...

AI Technical Summary

Problems solved by technology

Miniaturization can be achieved through semiconductor technology, but its absolute resistance is difficult to do well. In fact, the resistance precision is not high; within the size range of chip resistors, it is often tested to make the resistance value adjustable in a wide range. The main means of adjusting the chip resistance value in the semiconductor process is laser online trimming. Due to the particularity of the laser spot and the mechanical nature of the computer, it is natural for the graphic lines of the trimming object, their location, and the relationship between other lines. The distance, structural shape, etc. put forward the realistic requirements that must be suitable for mass production; laser trimming will inevitably bring damage to the resistance strip, and a good trimming result should ensure the integrity of the resistance strip, thereby ensuring the consistency of the resistance power Avoid local overheating

For so many years, in order to find a good solution and approach, microelectronics engineers have proposed many advanced design methods and means, but in the end they still did not get satisfactory results.

Images