Phosphorus oxychloride remover for phosphorus diffusion furnace
A technology of phosphorus oxychloride and removal device, applied in the directions of diffusion/doping, crystal growth, post-processing, etc., can solve the problems of phosphorus oxychloride leakage, operator harm, etc.
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[0031] Such as figure 2 Shown is the overall structure of the phosphorus oxychloride removal device of the phosphorus diffusion furnace of the present invention, which includes a buffer tank 2, an exhaust pipe 3 and a sealed water tank 4, and also includes a Figure 7 Cooling tank 5 shown.
[0032] Such as image 3 and Figure 4 As shown, it is a phosphorus diffusion furnace furnace tube furnace cap 1, which includes a cylindrical quartz material cap body 10 with a closed bottom, and an outwardly protruding opening mouth 12 is provided at the bottom of the cap body. A quartz snap ring 13 is welded on the inner wall, and the opening extension is arranged between the bottom surface of the snap ring and the bottom wall of the cap body. A quartz handle 11 is welded to the outer wall of the bottom of the cap body. The length of the opening extension mouth 12 is controlled at 3-5cm, and the inner diameter of the opening extension mouth is controlled at 0.5-1cm. The thickness o...
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