Adjustable gas distribution system and magnetron sputtering coating device comprising same

A gas distribution system and magnetron sputtering technology, applied in sputtering coating, ion implantation coating, vacuum evaporation coating and other directions, can solve the problems of decreased application effect, high production cost, difficult operation and maintenance, etc. To achieve the effect of convenient operation and maintenance, low production cost and uniform film layer
CN103014642AActive Publication Date: 2013-04-03GUANGDONG ZHICHENG CHAMPION GROUP
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
GUANGDONG ZHICHENG CHAMPION GROUP
Publication Date
2013-04-03

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Abstract

The invention discloses an adjustable gas distribution system and a magnetron sputtering coating device comprising the adjustable gas distribution system. The adjustable gas distribution system comprises at least two parallel gas distribution pipes; a flowmeter is arranged on each gas distribution pipe; blowing parts are arranged on two adjacent gas distribution pipes in a staggered manner and comprise a plurality of air holes which are of the same specification and formed uniformly; each air hole is formed in the radial direction of one gas distribution pipe; and the air holes are arranged in the axial directions of the gas distribution pipes in sequence. The gas distribution system is provided with at least two gas distribution pipes, and the blowing parts are on two adjacent gas distribution pipes in a staggered manner, so that gas blown out by the gas distribution system can reach a target surface uniformly, and then a film is ensured uniformity; the flowmeters are arranged on the gas distribution pipes, so that the flow rate of gas can be adjusted in real time, namely, the flow rate of gas can be adjusted accurately according to the distance between the target surface and the surface of an object to be coated, and different coating thicknesses; and the flow rates of gas blown out from all the gas distribution pipes can be the same, so that the purposes of controlling in real time and coating accurately can be achieved.
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Description

technical field

[0001] The invention relates to the technical field of magnetron sputtering coating, in particular to an adjustable gas distribution system and a magnetron sputtering coating device including the adjustable gas distribution system. Background technique

[0002] Magnetron sputtering coating technology is a widely used coating technology method at present. It is widely used in optics, microelectronics, wear resistance, corrosion resistance, decoration and other industrial fields to provide reliable and stable thin film coatings. Such as decorative color coating, mobile phone case coating, architectural glass low-e coating, ITO transparent conductive glass coating, etc.

[0003] The uniformity of the magnetron sputtering coating is very important, especially for the coating of optical and microelectronic products, and its uniformity has an important impact on the quality and yield of the product. There are many factors that affect the uniformity of the magnetro...

Claims

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