On-chip periodic variation refractive index lens photon chip three-dimensional coupler and preparation method thereof
A periodically changing, photonic chip technology, applied in the field of optoelectronics and integrated optics, can solve the problems of large refractive index difference between fiber and chip material, difficult to achieve photonic integration, refractive index mismatch, etc., to achieve three-dimensional coupling, easy to achieve Photonic integration, effect of reducing alignment accuracy
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[0027] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0028] like Figure 1 to Figure 3 As shown, an on-chip periodically varying refractive index lens photonic chip stereo coupler of the present invention includes a photonic chip 1 , a periodically varying refractive index lens layer 2 (hereinafter referred to as GRIN) and an optical fiber 3 . The photonic chip 1 includes a silicon substrate 12 , and a ridge waveguide 11 , a speckle converter 13 and a grating 14 grown and etched on the top surface of the silicon substrate 12 . The input port of the speckle converter 13 is equal to the width of the ridge waveguide 11 , and the input port of the speckle converter 13 is connected to the waveguide port of the ridge waveguide 11 . The output port of the speckle converter 13 is equal to the width of the grating 14 , and the output port of the speckle converter 13 is connected to the input port of t...
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