Excimer laser pulsed power source

Abstract

The invention discloses an excimer laser pulsed power source and belongs to the pulse power techniques. The excimer laser pulsed power source resolves the problem that a high-voltage magnetic switch in an existing pulsed power source needs a complex reset circuit, so that the circuit structure is simplified and reliability is improved. The excimer laser pulsed power source comprises an insulated gate bipolar translator (IGBT) switch tube, a switch tube driving circuit, a first-level magnetic switch, a direct current off-center current source, a saturable pulse transformer and a second-level magnetic switch. Due to the fact that the direct current off-center current source is arranged in the first-level magnetic switch compression circuit, the excimer laser pulsed power source is capable of controlling and adjusting the energy transferring efficiency of a primary energy storage circuit, the pulse compression width and pulse delay. By using the secondary winding of the saturable pulse transformer and the particularity that the power-charging voltage direction and the power-discharging voltage direction at two ends of the second-level magnetic switch are opposite, a magnetic core reset circuit is omitted. Due to the fact that the two levels of magnetic switches are both capable of working under a long-term high repetition rate condition, the excimer laser pulsed power source is strong in through-current capability, high in withstand voltage strength, very low in failure rate and basically free from maintenance. The excimer laser pulsed power source is particularly suitable for a short pulse electro-discharge excitation gas laser used for photoetching and requiring an accurate timing control.

Description

technical field [0001] The invention belongs to pulse power technology, and in particular relates to a pulse power supply for an excimer laser. Background technique [0002] The characteristics of the laser pulse power supply have a great influence on the working performance of the laser. For the discharge-pumped pulsed gas laser, in order to obtain a higher laser energy output, it is required to obtain a spatially uniform glow discharge in a high-pressure gas medium. Time It maintains a long discharge stability and makes it have high extraction efficiency. [0003] High-energy, high-power pulsed gas lasers usually have a large discharge cross section, high gas pressure, small mean free path of gas molecules, and high breakdown voltage. The key to high-pressure breakdown is the space charge field change caused by a single electron avalanche. The uniform glow discharge at high pressure needs to form a self-sustaining discharge before the electron density of the electron coll...

AI Technical Summary

Problems solved by technology

[0010] The invention provides a pulse power supply for an excimer laser, which solves the problem that a high-voltage magnetic switch in the existing pulse power supply requires a relatively complicated reset circuit, so as to simplify the circuit structure and improve reliability

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