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Sequential browning and green paint brushing-based flat package manufacturing process

A manufacturing process and flat packaging technology, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., to achieve broad market application prospects, high production efficiency, and easy-to-operate methods

Inactive Publication Date: 2013-04-17
HUATIAN TECH XIAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005]However, due to limitations such as technical difficulties, it is currently difficult to promote AAQFN products in the market, especially in terms of reliability, which directly affects the use and life of products. Become the technical difficulty of AAQFN package

Method used

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  • Sequential browning and green paint brushing-based flat package manufacturing process
  • Sequential browning and green paint brushing-based flat package manufacturing process
  • Sequential browning and green paint brushing-based flat package manufacturing process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] The first step, thinning: thinning thickness is 100μm, roughness Ra 0.10um;

[0032] The second step, dicing: use a wafer with a thickness of 100 μm, use a double-knife dicing machine and its process;

[0033] The third step, core: use adhesive 2 to core;

[0034] The fourth step, pressure welding: the same as the conventional AAQFN process;

[0035] The fifth step, one-time plastic sealing: use traditional plastic sealing compound 9920 for plastic sealing, which is the same as the conventional AAQFN process;

[0036] The sixth step, post-curing: the same as the conventional AAQFN process;

[0037] Step 7: Etching the groove on the back of the thin frame: using a thin frame, use ferric chloride solution to do partial window half-etching on the back of the frame to form a groove, and the depth is controlled within half the thickness of the frame;

[0038] The eighth step, browning, brushing green paint;

[0039] The ninth step, post-curing, grinding, tinning, printin...

Embodiment 2

[0041] The first step, thinning: thinning thickness is 130μm, roughness Ra 0.20um;

[0042] The second step, dicing: use a wafer with a thickness of 130 μm, use a double-knife dicing machine and its process;

[0043] The third step, core: use adhesive 2 to core;

[0044] The fourth step, pressure welding: the same as the conventional AAQFN process;

[0045] The fifth step, one-time plastic sealing: use traditional plastic sealing compound 9920 for plastic sealing, which is the same as the conventional AAQFN process;

[0046] The sixth step, post-curing: the same as the conventional AAQFN process;

[0047] Step 7: Etching the groove on the back of the thin frame: using a thin frame, use ferric chloride solution to do partial window half-etching on the back of the frame to form a groove, and the depth is controlled within half the thickness of the frame;

[0048] The eighth step, browning, brushing green paint;

[0049] The ninth step, post-curing, grinding, tinning, printin...

Embodiment 3

[0051] The first step, thinning: the thinning thickness is 170μm, and the roughness Ra is 0.30um;

[0052] The second step, dicing: use a wafer with a thickness of 170 μm, which is the same as the ordinary QFN scribing process;

[0053] The third step, core: use adhesive 2 to core;

[0054] The fourth step, pressure welding: the same as the conventional AAQFN process;

[0055] The fifth step, one-time plastic sealing: use traditional plastic sealing compound 9920 for plastic sealing, which is the same as the conventional AAQFN process;

[0056] The sixth step, post-curing: the same as the conventional AAQFN process;

[0057] Step 7: Etching the groove on the back of the thin frame: using a thin frame, use ferric chloride solution to do partial window half-etching on the back of the frame to form a groove, and the depth is controlled within half the thickness of the frame;

[0058] The eighth step, browning, brushing green paint;

[0059] The ninth step, post-curing, grindi...

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Abstract

The invention relates to a sequential browning and green paint brushing-based flat package manufacturing process, which belongs to the technical field of integrated circuit package. The manufacturing process comprises the following steps of: forming a groove in a framework by using a corrosion method; filling by using a sequential browning and green paint brushing method; and forming a more effective anti-drag structure between a one-time plastic package material and the framework. The reliability of the package is obviously improved, a dry film is used in place of a wet film, the package yield of a product is improved while the process difficulty is reduced, the method is easy to implement and the production efficiency is high.

Description

technical field [0001] The invention relates to a manufacturing process of a flat package based on first browning and then green paint, and belongs to the technical field of integrated circuit packaging. Background technique [0002] Integrated circuits are the core of the information industry and high-tech, and the foundation of economic development. Integrated circuit packaging is the main component of the integrated circuit industry, and its development has been accompanied by the increase in its functions and device count. Since the 1990s, it has entered the development track of multi-pin count, narrow pitch, and miniaturization. Carrierless grid array package (AAQFN) is a new packaging form born to adapt to the rapid development of electronic products, and it is an indispensable product for the realization of miniaturization, light weight and networking of electronic machines. [0003] There are no carrier grid array package components, no solder balls at the bottom...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/50H01L21/56
CPCH01L24/73H01L2224/32245H01L2224/48247H01L2224/73265H01L2224/92247H01L2924/181
Inventor 罗育光朱文辉谌世广王虎马晓波
Owner HUATIAN TECH XIAN