High-transmittance photon sieve
A high transmittance, photon sieve technology, applied in the direction of diffraction grating, etc., can solve the problems of low light intensity, constant light intensity, and poor photolithography effect, so as to improve the transmittance, increase the intensity of light, and improve the quality of photolithography. effect of effect
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[0041] Example one:
[0042] This embodiment discloses a high transmittance photon sieve, such as figure 1 As shown, the value marked on the abscissa and ordinate in the figure is the size of the intercepted photon sieve, including:
[0043] Multiple groups of transparent square micropores with different side lengths, each group of square micropores are distributed on the same ring at intervals, the ring where each group of square micropores is located is a series of concentric circles with different radii, the radius of the m-th ring r m And belt width w m Satisfy the relationship:
[0044] r m 2 = 2mfλ+m 2 λ 2 , W m =r m -r m-1 , M=1, 2, 3..., that is, m is a series of natural numbers starting from 1 excluding 0;
[0045] The λ is the wavelength of the incident light, and the f is the focal length of the photon sieve. Generally, the focal length f is fixed according to the actual situation, so the radius r of the ring can be finally determined by the wavelength of the light selected...
Example Embodiment
[0054] Embodiment two:
[0055] Replacing round microholes with square microholes can increase the light intensity at the focused spot. However, different settings of the square microholes can achieve different effects. In order to achieve the best results, this embodiment discloses an optimal height Transmittance photon screen, the photon screen in this embodiment includes:
[0056] A light-transmitting quartz substrate and an opaque metal chromium film plated thereon, the diameter of the quartz substrate is 10 cm, and a plurality of groups of light-transmitting square micropores with different side lengths are distributed on the metal chromium film, each group The square pores are distributed on the same ring at intervals, the diagonal of the square pores is parallel or perpendicular to the tangent of the ring belt where the square pores are located, and the rings where each group of square pores are located have a common center and different radii. The outer ring number m is a ...
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