Stray light testing method and system for optical system to be inspected

Abstract

The invention relates to a stray light testing method and system for optical system to be tested. The method comprises the following steps of: 1) obtaining irradiance of image surfaces of the optical system to be tested in different field angles; 2) replacing the optical system to be tested by using an attenuation slice and obtaining the irradiance of the attenuation slice; 3) according to the irradiance obtained in the step 2 of the attenuation slice, obtaining the irradiance at an entrance pupil of the optical system to be tested; and 4) according to the step 1 and the step 3, obtaining the point source transmittance of the optical system to be tested. The stray light testing method and system for optical system to be tested provided by the invention can conduct objective evaluation to the stray light suppression level of the tested optical system and can avoid uncertainty in evaluation by adopting a stray light coefficient at present.

Description

technical field [0001] The invention belongs to the field of optics, and relates to a method for testing stray light and a system thereof, in particular to a method for detecting stray light of an optical system to be tested and a system for detecting stray light. Background technique [0002] Stray light radiation refers to the non-target (or non-imaging) light radiation energy diffused on the surface of the detector (or imaging) in the optical system in addition to the target (or imaging light), as well as the target light that reaches the detector through an abnormal optical path radiant energy. The harmfulness of stray radiation lies in reducing the contrast and modulation transfer function of the image plane, reducing the level of the entire image plane, deteriorating the definition, and even forming stray light spots. In severe cases, the target signal is completely submerged by stray radiation noise. [0003] In order to ensure that the camera has a clear image and a...

AI Technical Summary

Problems solved by technology

[0015] In actual work, it is found that this method has many shortcomings: 1) It has no basic meaning

Because the value of the stray light coefficient depends on the specific geometry of the experimental device, the reproducibility is affected by the size of the black spot and the size of the limiting aperture; 2) It is not easy to compare correctly

The measurement conditions must be clearly specified in order to make the measurement results easy to compare; 3) The experimental conditions are very different from the use conditions, and the use effect cannot be predicted satisfactorily; 4) The black spots have illuminance, etc.

Therefore, the measurement results of the stray light coefficient cannot faithfully and accurately reflect the stray light situation of the system under test.

Images