Method for manufacturing metal surrounding solar cell
A solar cell and metal surround technology, which is applied in the manufacture of circuits, electrical components, and final products, can solve problems such as difficult collection, improve the collection rate, facilitate the screen printing process, and improve the photoelectric conversion efficiency.
Inactive Publication Date: 2013-06-19
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology
In the square lattice distribution, the photo-generated carriers generated at the intersection of the diagonals are far away from the through holes and are not easy to be collected; in the hexagonal lattice distribution, this non-uniformity is more serious, thus becoming an influence. Factors that cannot be ignored in the efficiency of solar cells
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Embodiment
[0053] Example: Manufacturing process of MWT solar cells arranged in an array of equilateral triangular through holes
[0054] Figure 5 It is a process flow chart of a MWT solar cell arranged in an equilateral triangular through-hole array according to an embodiment of the present invention. The method includes the following steps:
[0055] Step 1: Fabricate such as figure 2 An array of equilateral triangular through-holes 2 are shown, and the through-holes 2 run through the front and back of the substrate 1 .
[0056] Step 2: Perform anisotropic etching on the substrate 1 with the triangular through-hole array in an alkaline solution containing sodium hydroxide (NaOH) and isopropanol (IPA) to produce anti-textured surface 3 .
[0057] Step 3: In the tubular diffusion furnace, a gaseous source, a liquid source, or a solid source containing impurities of the opposite conductivity type to the substrate is used for impurity diffusion, and an emitter is formed on the front sid...
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The invention discloses a method for manufacturing a metal surrounding solar cell. The method includes the steps: manufacturing equilaterally triangular through hole arrays on a substrate; performing anisotropic etching for the substrate in alkaline solution to manufacture an antireflection suede; performing impurity diffusion for the substrate in a tubular diffusion furnace to form an emitting electrode; forming a front antireflection dielectric film and a back passivation dielectric film on the front surface and the back surface of the substrate; forming a base between the through hole arrays on the back surface of the substrate, and manufacturing an interdigital base electrode; manufacturing an interdigital emitter electrode in an emitter on the back surface of the substrate, filling through holes with the emitter electrode materials, and connecting all the through hole arrays; manufacturing fine grid metal electrodes arranged along the edge of an equilateral triangle on the front surface of the substrate; and sintering to form ohmic contact. By the aid of the equilaterally triangular through hole arrays, through hole distribution and electrode arrangement uniformity of the solar cell is improved, the collection rate of photon-generated carriers is increased, and the photoelectric conversion efficiency of the solar cell is improved.
Description
technical field [0001] The invention relates to the technical field of solar cells and their preparation, in particular to a method for manufacturing a metal-wrapped solar cell arranged in an array of equilateral triangular through holes. Background technique [0002] Metal Wrap Through (MWT) solar cells are a new type of high-efficiency photovoltaic devices that have become popular internationally in recent years. Since the shading of the surface electrodes is greatly reduced, the cell can generate more photogenerated current under the same solar irradiation conditions, thereby improving the photoelectric conversion efficiency of the cell. [0003] A common feature of MWT solar cells is that through holes are prepared on the battery through the front and back of the battery, and only fine grid metal wires are reserved on the front of the battery, and the positive and negative electrodes are placed on the back. When illuminated, the photogenerated carriers generated in the ...
Claims
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IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 朱洪亮黄永光朱小宁
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI