Manufacturing method of Mo alloy sputtering target materials and sputtering target materials
A technology for sputtering targets and manufacturing methods, which is applied in the manufacture of Mo alloy sputtering targets and the field of Mo alloy sputtering targets, can solve the problems of low adhesion of substrates, and achieve excellent adhesion, low resistance, The effect of improving reliability
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Embodiment 1
[0056] The following examples are given to illustrate the present invention in detail.
[0057] In order to produce a Mo alloy sputtering target with atomic ratio of 15%Ni-5%Nb-the balance being Mo and unavoidable impurities, Mo powder with a purity of 99.99% and an average particle size of 6μm and the atomization method were prepared. Ni with a purity of 99.9% and an average particle size of 70 μm 3 Nb alloy powder. For comparison, a melting method was attempted, but Mo was still melted and normal alloy lumps could not be produced.
[0058] Each powder was weighed so as to have the above composition, and mixed using a cross rotary mixer to obtain a mixed powder. After that, fill it into a mild steel container with an inner diameter of 133 mm, a height of 30 mm, and a thickness of 3 mm, heat at 450°C for 10 hours for degassing, then seal the mild steel container, and use a hot isostatic pressing (HIP) device at 1180°C, The sintering was carried out by keeping at 148MPa for ...
Embodiment 2
[0068] In order to make a Mo alloy sputtering target with atomic ratio of 20%Ni-10%Nb-the balance is Mo and unavoidable impurities, the following powders are prepared: Mo powder with a purity of 99.99% and an average particle size of 6μm; Ni-30Mo (atomic %) alloy powder with a purity of 99.9% and an average particle size of 100 μm produced by the chemical method; and Nb powder with an average particle size of 85 μm. For comparison, a melting method was attempted, but Mo was still melted and normal alloy lumps could not be produced.
[0069]Each powder was weighed so as to have the above-mentioned composition, and mixed using a cross rotary mixer to obtain a mixed powder. After that, fill it into a mild steel container with an inner diameter of 133 mm, a height of 30 mm, and a thickness of 3 mm, heat at 450°C for 10 hours for degassing treatment, then seal the mild steel container, and use a hot isostatic pressing (HIP) device at 1100°C, Sintering was carried out by keeping it...
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