Precision measurement error correction method for single-axis air bearing table
A precision measurement and error correction technology, applied in the field of measurement, can solve the problems of unstable accuracy and poor compensation effect, and achieve the effect of simple structure, low cost and high angle measurement accuracy
Inactive Publication Date: 2015-04-29
HARBIN INST OF TECH
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Problems solved by technology
[0004] In order to solve the problems of unstable accuracy and poor compensation effect in the existing correction method for angle measurement error, the present invention further provides a precision measurement error correction method for an air bearing table
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specific Embodiment approach 1
[0024] Specific implementation mode one: combine figure 1 and 2 , the specific process of the method for correcting the precision measurement error of the single-axis air bearing table in the present embodiment is as follows:
[0025] The detection of angle measurement error is carried out by using an autocollimation light pipe and a 17-sided prism. First, install and fix the 17-sided prism on the air bearing table, adjust the prism and light pipe system, make the light pipe align with a working surface of the prism, and then rotate the shaft system to detect the vicinity of the selected detection angle in turn (detection angle beta 0 is the initial value selected according to the accuracy of the specific project). Adjust the fine-tuning mechanism on the shaft to make the reading of the light tube as small as possible each time, measure 17 points, turn the air bearing table in turn based on the angle measuring system, and read the reading of the computer α i (i=1,2,...,17...
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The invention relates to the technical field of measurement, and particularly relates to a precision measurement error correction method for a single-axis air bearing table, which solves the problems of unstable precision, poor compensation effect and the like of the existing rotation angle measurement error correction method. The precision measurement error correction method for the single-axis air bearing table comprises the following steps: regulating balance of an air bearing table, and subtracting the reading alpha i (i=1, 2, -, 17) of a computer by a selected detection angle beta i (i=1, 2, -, 17) to obtain a result which is equal to the rotation angle error value yi (i=1, 2, -, 17) of the air bearing table; conducting linear interpolation correction according to a formula xi=i(i=1, 2, -, 17), respectively calculating 16 linear piecewise functions, and correcting a grating angle displayed by the computer; then measuring a new rotation error value zi (i=1, 2, -, 17), conducting harmonic correction according to the formula, calculating a harmonic correction function, correcting the grating angle displayed by the computer to obtain a final rotation angle error value si (i=1, 2, -, 17), determining whether the rotation error value is larger than the required precision, and conducting harmonic correction again if the rotation error value is larger than the required precision, otherwise, processing the final result. The air bearing table precision measurement error correction method provided by the invention has the advantages of simple structure, low cost and high angle measurement precision.
Description
technical field [0001] The invention relates to a method for correcting precision measurement errors of a single-axis air bearing platform, and relates to the technical field of measurement. Background technique [0002] The single-axis air bearing platform is a multifunctional full-physics simulation platform developed for the attitude control of modern satellites. Its principle is to suspend the platform in the air by injecting compressed air, so the whole system has the advantage of small damping. When we calculate the disturbance torque, we must know its angular velocity and angular acceleration, so the measurement accuracy of its rotation angle directly affects the physical simulation effect of the satellite attitude control system. [0003] At present, the domestic engineering practice and the existing literature have high cost and complex algorithms for the correction method of the angle measurement error, and the application in high-precision occasions is limited, an...
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IPC IPC(8): G01C25/00
Inventor 王岩赵明史月付振宪
Owner HARBIN INST OF TECH