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Method for manufacturing micro-nano-sized coaxial tubes

A coaxial tube, size technology, applied in nanotechnology, cells, electrolysis process and other directions, can solve the problems of low efficiency and control accuracy, achieve high efficiency and control accuracy, improve efficiency and control accuracy.

Active Publication Date: 2015-10-28
宁波微极电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the above-mentioned techniques are used to prepare tubular structures, the current three-dimensional writing filament winding method has low efficiency and control accuracy

Method used

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  • Method for manufacturing micro-nano-sized coaxial tubes
  • Method for manufacturing micro-nano-sized coaxial tubes
  • Method for manufacturing micro-nano-sized coaxial tubes

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Embodiment Construction

[0023] The present invention will be described in further detail below with specific examples, but the present invention is not limited to the following specific examples.

[0024] Follow the steps below to fabricate micro-nano-sized coaxial tubes:

[0025] 1) combine Figure 1-Figure 5 , providing a conductive substrate 2 and three micro-electrolytic conduits 1 with inner diameters of different sizes (500nm, 1.2 μm, 2 μm) for micro-area electrowinning;

[0026] 2) With the aid of a computer-controlled micro-area electrolytic deposition system, a micro-electrolytic catheter 1 with an inner diameter of 500nm is used to electrodeposit a columnar structure 3 of metal material tungsten on a conductive substrate. The diameter of the columnar structure 3 is 500nm; the micro-electrolytic catheter 1 serves as a micro-area One of the main components of the electrolytic deposition system, the micro-electrolysis catheter 1 can supply the electrolyte, and the required material can be ele...

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Abstract

The invention discloses a method for manufacturing a micro-nano coaxial tube. The method comprises the following steps of: (1) providing a conducting base plate and three microelectrolysis guide tubes with different inner diameters (D1, D2 and D3), wherein D1 is less than D2 and D2 is less than D3; (2) electrically depositing a columnar structure of an A material on the conducting base plate by using the microelectrolysis guide tube with the inner diameter D1 by virtue of a micro area electrolytic deposition system, wherein the diameter of the column is D1; (3) around the columnar structure of the A material, electrically depositing a straight tubular micro-nano structure of a B material on the conducting base plate by using the microelectrolysis guide tube with the inner diameter D2, wherein the diameter of the columnar structure of the A material is D1; and (4) around the straight tubular micro-nano structure of the B material, electrically depositing a straight tubular micro-nano structure with the A material on the conducting base plate by using the microelectrolysis guide tube with the inner diameter D3, wherein the outer diameter of the straight tubular micro-nano structure of the material B which is obtained in the step (3) is D2. The method can be directly used for preparing the micro-nano coaxial tube with high efficiency and high control precision by utilizing common single-glass microelectrolysis guide tubes.

Description

technical field [0001] The invention relates to the field of micro-nano material manufacturing, in particular to a method for manufacturing a micro-nano-sized coaxial tube. Background technique [0002] A micro-nano structure is a micron or nanoscale material structure, and a micronano structure array is an ordered material structure at a micron or nanoscale. The material can be metal, ceramic, semiconductor or organic material, with specific electrical, Magnetic, optical and mechanical properties and functions, used in various microelectronics and optoelectronic chip manufacturing, precision machining and medical equipment fields. Micro-nano-sized coaxial tubes specifically refer to metal, semiconductor or ceramic coaxial tube structures in micron and nanoscale. [0003] Micro-area electrolytic deposition technology is a micro-nano processing technology based on scanning probe technology (SPT). Its principle is to use a micro-electrolytic catheter with a diameter of m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D7/00C25D5/02C25D5/04C25D17/00C25D21/12B82Y40/00
Inventor 俞敏莉郑建红李立峰
Owner 宁波微极电子科技有限公司
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