A Micro Spectrometer Based on MEMS Interferometry Platform

Abstract

The invention discloses a micro spectrometer based on a micro-electro-mechanical interference platform. The micro spectrometer comprises a light-path system and a circuit system, wherein the light-path system comprises a light source, two collimating lenses, a sample pool, a dichroscope, a beam splitter mirror, a total reflection mirror, a micro-electro-mechanical interference platform, a dichroscope, a light filter and two detector; the circuit system comprises a data processing module which comprises photoelectric detection, core algorithm and spectral data processing; light emitted from a light source ensures that excited samples in the sample pool emit sample light, and after the light source penetrating through the sample pool is split, one beam of the light is used as reference light, and the other beam of the light is used as feedback light. The three types of light are fed into the circuit system after a series of actions, the circuit system sends spectral information of the collected sample light into a spectral database system, and compares the spectral information with the known data in the spectral database so as to judge the chemical composition of unknown substances. The micro spectrometer disclosed by the invention has the advantages that the chemical composition of the unknown substances can be conveniently judged, the cost is low and the accuracy is high.

Description

technical field [0001] The invention relates to the field of optical and electronic circuit design of micro-electro-mechanical systems, and more specifically, relates to a micro-spectrometer based on a micro-electro-mechanical interference platform. Background technique [0002] Micro-electro-mechanical systems (MEMS for short) is a three-dimensional device manufactured by micro-machining technology, including at least one movable structure to satisfy a certain mechanical action. MEMS devices are used in many different fields because they borrow the technology of integrated circuits. More and more sensors and actuators in this century tend to adopt MEMS technology, among which microelectromechanical system micromirrors are an excellent example. The force generated by the MEMS-actuated structure is small but sufficient to drive the deflection of the mirror. Among the many MEMS micromirrors, the electrothermal micromirror is a microelectromechanical system that deflects the ...

AI Technical Summary

Problems solved by technology

[0004] Existing spectrometers that can be used for chemical substance analysis are generally costly, bulky, and inconvenient to carry, therefore, it is inconvenient to use

[0005] Although there are already some relatively mature control schemes in the field of spectrometers, there are no design schemes in the field of micro-electromechanical interference platform as the core, especially low-cost, high-precision, and miniaturized design schemes.

[0006] Based on the above description, there is an urgent need for a spectrometer with a micro-electromechanical interference platform as the core to solve the problems of large volume, high cost, and inconvenient portability in existing spectrometers, and it can also be used in food safety testing, field prospecting, and safety. Explosion-proof, environmental monitoring and other fields

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