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Singlechip integrated type carbon nano tube humidity sensor based on sine wave stimulation

A humidity sensor, carbon nanotube technology, applied in the direction of material resistance, etc., to achieve the effect of small size, cost saving, and convenient signal detection

Inactive Publication Date: 2015-01-14
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional integration method of humidity sensor and interface circuit is double-chip or multi-chip, and its integration is difficult to solve the problems of errors and noise interference caused by PCB board-level connections between discrete sensors and circuit chips or external wiring.

Method used

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  • Singlechip integrated type carbon nano tube humidity sensor based on sine wave stimulation
  • Singlechip integrated type carbon nano tube humidity sensor based on sine wave stimulation
  • Singlechip integrated type carbon nano tube humidity sensor based on sine wave stimulation

Examples

Experimental program
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Effect test

specific Embodiment approach 1

[0013] Specific implementation mode one: combine figure 1 , figure 2 , image 3 , Figure 4 Explain that this embodiment includes a micro-carbon nanotube humidity sensor 2 with a heating unit and a sine wave excitation interface circuit 1;

[0014]The sine wave excitation interface circuit 1 is a detection resistance type sine wave excitation circuit 19 or a detection capacitance type sine wave excitation circuit 20; the detection resistance type sine wave excitation circuit 19 is composed of the first sine wave generating circuit 8, the first switch S1, the first preamplifier circuit 4, the first phase-sensitive demodulation circuit 5, the first low-pass filter circuit 6, the first temperature compensation circuit 10, the first comparator 9, and the first adder circuit 7; The switch S1 is a standard CMOS pair tube switch with a control terminal; the output terminals of the first sine wave generating circuit 8 are respectively connected with the first input terminal of the...

specific Embodiment approach 2

[0015] Specific implementation mode two: combination figure 1 , figure 2 Note that the difference between this embodiment and the first embodiment is that when the characteristic size of the CMOS IC process is 0.5um, the total area of ​​the pair of interdigitated electrode layer structures is 1800um×1800um, and the pole width of the interdigitated electrodes is 90um, the distance between the two poles is in the range of 30-60um; the size of each pad window 2 is 90um×90um.

[0016] Working principle: set polysilicon resistor A1 around the carbon nanotube humidity sensitive film A4, periodically energize the heating unit formed by the parallel connection of polysilicon resistors A1, and promote the removal of water vapor and other adsorbed impurities by increasing the surface temperature of the carbon nanotube humidity sensitive film A4 Attachment: The sensor applies a sine wave signal to ensure that the entire interface circuit works normally at a frequency lower than 1MHz. T...

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Abstract

The invention discloses a singlechip integrated type carbon nano tube humidity sensor based on sine wave stimulation, relates to a humidity detection sensor, and aims to solve the problem of errors and noise interference, which is caused by concatenation between the sensor and a PCB (printed circuit board) of a circuit chip or external wire linking when the sensor is integrated with two chips or multiple chips of an interface circuit at the present. The singlechip integrated type carbon nano tube humidity sensor comprises a micro carbon nano tube humidity sensor with a heating unit and a sine wave stimulation interface circuit. All circuits of the singlechip integrated type carbon nano tube humidity sensor are integrated on the same chip, so that the structure is simple and easy to implement; the size is small; the integration degree is high; the chip manufacturing cost and the packaging cost are reduced; the humidity sensitivity of the sensor based on alternating current stimulation is high; an output signal is high in stability; a multiporous carbon nano tube thin film is used as a humidity sensitive layer; the sensor can easily adsorb and desorb water steam; the response speed is high; the singlechip integrated type carbon nano tube humidity sensor can work normally under a high-humidity environment and detect signals conveniently.

Description

technical field [0001] The invention relates to a sensor for humidity detection. Background technique [0002] Humidity sensors are widely used in meteorological monitoring, industrial production, warehousing, household appliances and other fields. Based on human needs for meteorological monitoring, environmental measurement and control in industrial production processes, material storage, and detection and control of environmental humidity in home life, humidity Sensors have been continuously researched and developed, and have become one of the most widely used chemical sensors. The advancement of material chemistry and microelectronics technology has provided new impetus for the development of miniaturization and high performance of sensors. The development of new humidity-sensitive materials and the promotion of miniaturized and integrated humidity sensors have become a clear direction for scientific research and marketization; in addition, the development of multi-funct...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/12
Inventor 刘晓为李拓尹亮付强董长春
Owner HARBIN INST OF TECH
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