Light beam movement track control device for laser processing

Abstract

The invention relates to a light beam movement track control device for laser processing. The light beam movement track control device comprises a light beam transmission direction control module, a light beam movement track imaging amplification module and a light beam focusing and focus switching module, wherein the light beam transmission direction control module is used for modulating a transmission direction of an incident beam which is emitted onto the light beam transmission direction control module, the light beam movement track imaging amplification module is used for amplifying an optical axis movement track of the first light beam and performing beam expanding collimation on the first light beam to form a second light beam simultaneously, and the light beam focusing and focus switching module is used for focusing the second light beam and controlling a laser focus to switch among different processing units or performing auxiliary movement control on the laser focus within one processing unit. The light beam movement track control device has the advantages that the structure is simple, the transmission directions of the light beams can be controlled flexibly, sizes of light beam scanning movement tracks, light beam rotation radiuses and the like can be adjusted dynamically, meanwhile, scanning speeds of the laser processing light beams are accelerated, the large-size processing is facilitated, and the requirements of actual laser processing are met.

Description

technical field [0001] The invention relates to the field of laser processing, in particular to a beam movement trajectory control device for laser processing. Background technique [0002] The patent application number is 201010183539.7. The beam rotation module used cannot dynamically change the beam rotation diameter during processing. It is only suitable for the situation where the diameter of the drilling hole on the same workpiece surface changes little, so it has certain limitations. [0003] In the patent application number 200380110303.9, the circular modulation motion of the light beam in front of the vibrating mirror is a circular motion by reflecting the modulated laser light through the reflector, and the reflector is driven by piezoelectric ceramics, and its deflection range is very small, making it difficult to process larger holes. [0004] The patent application number is 201210460145.0. Since the flat optical element works in a swing mode, the range of modu...

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Problems solved by technology

[0003] The patent application number is 200380110303.9. The circular modulation motion of the light beam in front of the vibrating mirror is a circular motion by reflecting the modulated laser light through the mirror, and the mirror is driven by piezoelectric ceramics. The deflection range is very small, and it is difficult to process larger holes.

[0004] The patent application number is 201210460145.0. Since the flat optical element works in a swing mode, the range of modulation movement of the flat optical element to the laser beam is very small, which is not suitable for processing a large format. Smaller, the higher the cycle frequency of repeated scanning, but because the general processing graphics have certain size requirements, the cycle frequency of repeated scanning cannot be increased, which has limitations

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