Developing device and developing method

A developing device and developing solution technology, applied in photography, instruments, electrical components, etc., can solve the problem of easily causing debris, and achieve the effect of keeping the concentration consistent and improving the uniformity of line width.

Inactive Publication Date: 2013-09-25
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the size of the glass substrate 3 of the high-generation production line is particularly large, it is easy to cause fragments when rotated. This method is not suitable for the high-generation production line, so this developing method can only be used for small-sized glass substrates 3

Method used

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Embodiment Construction

[0041] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the following will clearly and completely describe the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0042] Unless otherwise defined, the technical terms or scientific terms used herein shall have the usual meanings understood by those skilled in the art to which the present invention belongs. "First", "second" and similar words used in the patent application specification and claims of the present invention do not indicate any order, quantity ...

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Abstract

The invention provides a developing device and a developing method. According to the developing device and the developing method, the consistent concentration of a developing liquid contacted by glass in each direction can be ensured by arranging a spray nozzle used for spraying the developing liquid, a machine table used for bearing a glass substrate, and an inclination controller used for controlling the spray nozzle and the machine table to incline an angle towards a direction, and keeping the angle in a preset time, controlling the machine table and the spray nozzle to slant a preset angle towards the first direction of the machine table by the inclination controller during an inclination cycle period, and keeping the angle in a preset time, controlling the machine table and the spray nozzle to sequentially slant the preset angle towards the other directions of the machine table by the inclination controller according to a preset inclination direction sequence, and keeping the inclination angle in a preset time; consequently, the line width uniformity after developing can be improved.

Description

technical field [0001] The invention relates to the technical field of manufacturing liquid crystal display panels, and specifically relates to a developing device and a developing method. Background technique [0002] In the production process of liquid crystal display (TFT-LCD), the photoresist coated on the glass substrate needs to be developed after exposure to obtain the required pattern. [0003] Such as figure 1 , 2 As shown, in the developing device of the current high-generation production line, the glass substrate 3 is set in the developing tank at a certain inclination angle (θ) relative to the machine 1, and the inclination direction and inclination angle remain unchanged, which is used for spraying the developer. The inclination angle and direction of the nozzle 2 are consistent with the glass substrate 3, and are located above the inclination surface during the developing process ( figure 1 The glass substrate 3 on the a-a side of the middle glass substrate ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/30
CPCG03F7/30G03F7/3021H01L27/1259G03G15/104
Inventor 黄常刚吴洪江李圭铉
Owner BOE TECH GRP CO LTD
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