Electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof
A piezoelectric detection and electrostatic drive technology, used in measuring devices, steering induction equipment, instruments, etc., can solve the problems of low signal sensitivity, difficult to achieve high precision, poor impact resistance, etc., and achieve a simple manufacturing process and simple structure. , the effect of easy processing
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[0031] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0032] Such as figure 1 , figure 2 , image 3 As shown, this embodiment includes:
[0033] A disc vibrator 1 without a release hole;
[0034] a support column 2 located at the center below the disc vibrator 1;
[0035] Substrate 3;
[0036] a detection electrode 4 located on the disc vibrator 1;
[0037] The drive electrodes 5 , balance electrodes 6 and isolation electrodes 7 located on the substrate 3 . The drive electrode 5, the balance electrode 6 and the isolation electrode 7 are distr...
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