Electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof

A piezoelectric detection and electrostatic drive technology, used in measuring devices, steering induction equipment, instruments, etc., can solve the problems of low signal sensitivity, difficult to achieve high precision, poor impact resistance, etc., and achieve a simple manufacturing process and simple structure. , the effect of easy processing

Active Publication Date: 2013-10-09
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] This technology has the following disadvantages: the gyroscope adopts the traditional spring-mass structure model, the signal sensitivity obtained is not high, the Q value is low, the zero drift is too large, the impact resistance is poor, and it is difficult to achieve high precision

Method used

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  • Electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof
  • Electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof
  • Electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof

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Embodiment Construction

[0031] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0032] Such as figure 1 , figure 2 , image 3 As shown, this embodiment includes:

[0033] A disc vibrator 1 without a release hole;

[0034] a support column 2 located at the center below the disc vibrator 1;

[0035] Substrate 3;

[0036] a detection electrode 4 located on the disc vibrator 1;

[0037] The drive electrodes 5 , balance electrodes 6 and isolation electrodes 7 located on the substrate 3 . The drive electrode 5, the balance electrode 6 and the isolation electrode 7 are distr...

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Abstract

The invention relates to an electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and a manufacturing method thereof. The gyroscope comprises a disk vibrator with no release hole, a cylindrical supporting pillar, driving electrodes, equilibrium electrodes and isolation electrodes which are disposed on a substrate, and detection electrodes disposed on the disk vibrator, wherein the detection electrodes are disposed on the disk vibrator; and the driving electrodes, the equilibrium electrodes and the isolation electrodes are disposed on the substrate in a circumference manner and below the disk vibrator, and at the same time, have a gap with the disk vibrator. A piezoelectric effect is used as a detection principle by the gyroscope for extracting deformation signals; and at the same time, non-contact equilibrium electrodes are employed to apply electric potentials to lower electrodes, thereby optimizing the structure of the gyroscope. The gyroscope is manufactured by adopting an MEMS processing technology which is simple in manufacturing process, high in reliability and can guarantee relatively low cost and relatively high yield. Besides, the gyroscope is small in size and simple in structure, and is suitable for large-scale production.

Description

technical field [0001] The present invention relates to a micro-gyroscope in the field of micro-electromechanical technology and a manufacturing method thereof, in particular to a three-axis micro-gyroscope with a disk-shaped resonator utilizing bulk acoustic wave saddle resonance mode and its Production Method. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, high reliability, and adaptability to various harsh environments. [0003] After searching the literature of the existing technology, it was found that the Chinese patent "Double-axis MEMS gyroscope" (patent app...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56G01C25/00
Inventor 张卫平成宇翔张弓许仲兴唐健陈文元汪濙海
Owner SHANGHAI JIAO TONG UNIV
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