Preparation method of narrow graphene nanoribbons
A nano-narrow band and graphene technology, applied in the direction of nanotechnology, nanotechnology, nanotechnology for materials and surface science, etc., can solve the problems that cannot be changed at will, and achieve the effect of easy control of size, high efficiency and simple process
Active Publication Date: 2015-03-11
TSINGHUA UNIV +1
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[0007] Compared with the prior art, the preparation method of the graphene nano-narrow ribbon provided by the present invention utilizes the carbon nanotube stretched film structure as a patterned Joule heat source, since the carbon nanotube stretched film structure includes a plurality of aligned strips Gaps and carbon nanotube bundles, and the width of the aligned banded gaps and carbon nanotube bundles can be adjusted by adjusting the number of layers of the carbon nanotube drawn film in the carbon nanotube drawn film structure and treating the carbon nanotube drawn film with an organic solvent film or use methods such as laser scanning the carbon nanotube film to adjust. Therefore, the size of the graphene nano-bands obtained by the preparation method of the present invention is easy to control, thereby overcoming the fact that the ordinary photoresist mask cannot be changed at will after molding. Defects in pattern and size
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[0018] Please also refer to figure 1 and figure 2 , the embodiment of the present invention provides a kind of preparation method of graphene nano-narrow belt 10, and this method comprises the following steps:
[0019] S1: providing a substrate 20, the substrate 20 is in contact with a heating device 60, and the heating device 60 is used to adjust the temperature of the substrate 20;
[0020] S2: arrange a graphene film 30 on the upper surface of the substrate 20, arrange two mutually parallel strip electrodes 50 on the surface of the graphene film 30 away from the substrate 20, and electrically insulate from the graphene film 30;
[0021] S3: Provide a carbon nanotube drawn film structure 40, cover the carbon nanotube drawn film structure 40 on the surface of the graphene film 30 away from the substrate 20, the carbon nanotube drawn film structure 40 and the two strip electrodes 50 electrical contacts;
[0022] S4: energize the carbon nanotube drawn film structure 40 thro...
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Abstract
A method for making a strip shaped graphene layer includes the following steps. First, a graphene film is located on a surface of a substrate is provided. Second, a carbon nanotube structure is disposed on the graphene film. The carbon nanotube structure includes a plurality of carbon nanotube segments and a number of strip-shaped gaps between the adjacent carbon nanotube segments. Third, the graphene film exposed by the strip-shaped gaps is removed by applying a voltage to the carbon nanotube segments and heating the substrate.
Description
technical field [0001] The invention relates to a preparation method of graphene nano-narrow ribbons, in particular to a preparation method of aligned graphene nano-narrow ribbons. Background technique [0002] Graphene has a stable two-dimensional lattice structure and excellent electrical properties, and has rapidly become a "star molecule" in the family of carbon materials in recent years. Due to its compatibility with traditional silicon semiconductor processes and the lack of selective growth faced by carbon nanotubes, graphene shows broad application prospects in the field of micro-nano electronic devices, and is expected to become the core material for building next-generation electronic devices . [0003] The shape of graphene sheets determines its energy band structure, which in turn determines its electrical properties, which in turn determine its application potential. At present, a major challenge for the practical application of graphene-based electronic devic...
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IPC IPC(8): C01B31/04B82Y40/00
CPCC01B31/0438B82Y40/00B82Y30/00H01L21/02444C01B32/19
Inventor 林晓阳姜开利范守善
Owner TSINGHUA UNIV