Air flotation pipe joint assembly and six-degree-of-freedom air flotation pipe joint and mask table using the same
A technology of pipe joints and air flotation, applied in the direction of pipes/pipe joints/fittings, pipe elements, adjustable connections, etc., can solve problems such as unrealized engineering, and achieve the effect of reducing disturbance
Active Publication Date: 2015-08-26
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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However, the technology is still in the conceptual design stage and has not yet been engineered.
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[0038] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.
[0039] The invention provides a six-degree-of-freedom air flotation joint, which has the function of mixing and connecting vacuum and positive pressure air paths, and has a certain operating stroke in the six-degree-of-freedom direction.
[0040] Please refer to figure 2 figure 2 Shown is a schematic diagram of the principle of a six-degree-of-freedom air flotation pipe joint in a preferred embodiment of the present invention. from figure 2It can be seen from the figure that the pipe joint is mainly composed of Z-direction air bearing 201 (including 201a and 201b), Z-direction air pipeline 202, X-direction air bearing 203 (including 203a and 203b), X-direction air pipeline 204, The Y-direction air bearing 205 (including 205a and 205b ) and the Y-direction air pipeline 206 are composed. Vacuu...
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The invention provides an air floating pipe joint component and a six-degree-of-freedom air floating pipe joint and a mask platform both applying the same. The six-degree-of-freedom air floating pipe joint is mainly composed of an X-direction air floating shaft rod, a Y-direction air floating shaft rod, a Z-direction air floating shaft rod, an X-direction air floating shaft sleeve, a Y-direction air floating shaft sleeve and a Z-direction air floating shaft sleeve, vacuum and barotropic gas provides air to a moving platform micropositioner through an air incoming block fixed on a coarse movement platform (or a cable platform), and a certain friction-free moving distance exists in each of six-degree-of-freedom directions of X / Y / Z / Rx / Ry / Rz, so that the problem of six-degree-of-freedom coupling of air delivery is completely solved, and disturbance on moving performance of the micropositioner due to rigidity of a hose itself can be effectively lowered. The air floating pipe joint component and the six-degree-of-freedom air floating pipe joint and the mask platform both applying the same have a vacuum and barotropic air way mixing and transferring function and have certain friction-free moving distances in the six-degree-of-freedom directions.
Description
technical field [0001] The invention relates to the field of photolithography devices in integrated circuit manufacturing, and in particular to an air flotation pipe joint assembly, a six-degree-of-freedom air flotation pipe joint and a mask table using the air flotation pipe joint assembly. Background technique [0002] The photolithography apparatus in the prior art is mainly used in the field of integrated circuit IC or flat panel display and the manufacture of other micro devices. With a photolithographic apparatus, multilayer masks with different mask patterns are sequentially imaged in precise alignment on a photoresist-coated wafer, such as a semiconductor wafer or an LCD panel. Lithography devices are generally divided into two categories, one is a stepping lithography device, the mask pattern is exposed and imaged on one exposure area of the wafer, and then the wafer moves relative to the mask to move the next exposure area to the mask pattern and under the proje...
Claims
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IPC IPC(8): F16L27/00F16L39/00F16C32/06G03F7/20
Inventor 江旭初
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD