Graphene pressure sensors

Abstract

Semiconductor nano pressure sensor devices having graphene membrane suspended over open cavities formed in a semiconductor substrate. A suspended graphene membrane serves as an active electro-mechanical membrane for sensing pressure, which can be made very thin, from about one atomic layer to about 10 atomic layers in thickness, to improve the sensitivity and reliability of a semiconductor pressure sensor device.

Description

Technical field [0001] The field generally relates to semiconductor nanodevices for sensing pressure, and in particular, to semiconductor nano pressure sensor devices constructed using thin graphene films. Background technique [0002] Generally, semiconductor nano pressure sensor devices are used to measure, for example, the pressure of gas or liquid, and are used in various control and real-time monitoring applications. Semiconductor nano pressure sensor devices can also be used indirectly to measure other variables, such as fluid flow, gas flow, speed, water level, and altitude. Commonly used pressure sensors implement a strain gauge device, which has an active membrane made of silicon (single crystal), polysilicon thin film, bonded metal foil, thick film, or sputtered thin film, etc. Typically, the thinner the active membrane, the greater the deformation of the membrane material in response to external pressure, thereby providing higher sensitivity and accuracy. However, du...

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Problems solved by technology

However, fabricating ultra-thin silicon membranes for use in pressure sensor devices is challenging due to the fragility of the material

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