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Microwave ion source

A microwave ion and microwave window technology, applied in the field of ion sources, can solve the problems of structural asymmetry, poor plasma concentration uniformity, etc., and achieve the effects of good uniformity, improved quality, and good plasma concentration uniformity

Inactive Publication Date: 2013-12-04
CHINA INSTITUTE OF ATOMIC ENERGY
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Problems solved by technology

[0005] The invention overcomes the shortcomings of asymmetric structure and poor uniformity of plasma concentration in the prior art, and provides a structure with good symmetry and uniformity of plasma concentration in the discharge chamber, which is beneficial to improve the quality of the extracted beam and can further extend the microwave Microwave Ion Source

Method used

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  • Microwave ion source

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Embodiment Construction

[0019] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:

[0020] Such as figure 1 As shown, a microwave ion source includes a waveguide 2, a discharge chamber 12, an excitation coil 10, a vacuum chamber 11 and an extraction system. The coil 10, the ion outlet at the other end communicates with the vacuum chamber 11, and an extraction system is arranged on the ion beam extraction channel, and the extraction system extracts ions from the discharge chamber 12 to form a beam current. In this embodiment, the extraction system adopts a three-electrode structure, namely The plasma electrode 14 , the suppression electrode 15 and the ground electrode 16 , the plasma electrode 14 and the suppression electrode 15 form an accelerating field to extract ions from the plasma of the discharge chamber 12 to form an extraction beam 17 . In the waveguide 2, a center plate 3 is arranged, and the center plate 3 is closely...

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Abstract

The invention discloses a microwave ion source which comprises a waveguide, a discharge chamber, a magnet exciting coil, a vacuum chamber and an extraction system. The waveguide is connected with one end of the discharge chamber through a microwave window, the magnet exciting coil is wound around the discharge chamber, an ion outlet at the other end is communicated with the vacuum chamber, the extraction system is arranged on an ion beam leading-out channel and leads irons out of the discharge chamber to form beam flows, a middle partition plate is arranged in the waveguide and tightly adheres to the microwave window, and cooling water is led into the middle partition plate to perform forced cooling. The microwave ion source is good in symmetry, the plasma concentration evenness in the discharge chamber is good, improvement of the quality of led-out beam flows is facilitated, and the lifetime of a microwave source can be further prolonged.

Description

technical field [0001] The invention relates to the technical field of ion sources, in particular to a new structure of a microwave ion source. Background technique [0002] The principle of the microwave ion source is to select the appropriate microwave and feed the microwave power into a discharge chamber through the microwave coupling window. The discharge chamber is in a certain magnetic field. When the intrinsic frequency of the electrons orbiting the magnetic field lines in the discharge chamber is equal to the frequency of the fed microwave, the electrons resonate with the microwave field and absorb energy from the microwave. The electrons that gain energy make The working gas in the discharge chamber is ionized to form plasma, and the ions in the plasma are extracted by the accelerating electric field to form the required ion beam. The microwave ion source has the advantages of high discharge efficiency, strong beam current, good beam quality, high proportion of mon...

Claims

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Application Information

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IPC IPC(8): H01J37/08H01J37/32H05H1/46
Inventor 崔保群蒋渭生唐兵马瑞刚马鹰俊陈立华黄青华
Owner CHINA INSTITUTE OF ATOMIC ENERGY
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