Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array

Abstract

This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label- free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro / Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means.

Description

[0001] This application claims the benefit of U.S. Provisional Patent Applications Serial No. 61 / 409,111, filed November 1, 2010, and Serial No. 61 / 430,871, filed January 7, 2011, both of which are fully incorporated herein by reference in their entirety middle. technical field [0002] The present invention relates to a microelectromechanical system (also referred to as "MEMS") Miniaturized Integrated MEMS Optical Sensor Array (MIMOSA), and more preferably to sensor arrays using moving mechanical surfaces, and most preferably to label-free biosensing. Background technique [0003] In the sensing area, vibrating mechanical structures such as microcantilever arrays find various applications based on advantages such as lower detection limits due to miniaturization, the ability to optimize the shape of the cantilever, selectively placing functionalized regions The capability on these cantilevers (also referred to interchangeably as "microcantilevers"), and the possibility to w...

AI Technical Summary

Problems solved by technology

Such systems that meet the needs of parallel, label-free, and highly selective sensing are thought to not exist today because microsystems technology and readout methods are not able to meet expectations for a variety of reasons including: Associated with functional surfaces robustness issues and lack of a truly integrated, array-compatible readout technology

Alternatively, microarray technologies are believed to be able to provide parallel and selective detection but are not available in the field as they require specialized skills to run and maintain and require expensive infrastructure due to complex labeling and sensing methods

While many field applications such as pregnancy test kits or glucose sensors exist, these are limited to one species and lack parallel detection capabilities

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