Joule-level pulse laser light source
A pulsed laser, femtojoule-level technology, applied in the field of optical metrology, can solve the problems that the transmittance of the neutral attenuator cannot be calibrated and verified, the uniformity of the beam cannot be guaranteed, and the accurate value cannot be provided, so as to avoid the transmittance Unable to calibrate and verify, the transmittance is stable and reliable, and the effect of avoiding the problem of beam inhomogeneity
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[0015] The present invention will be described in further detail below in conjunction with the accompanying drawings and preferred examples.
[0016] like figure 2 As shown, the flying focus light source of the preferred embodiment of the present invention includes a laser 1, a collimator mirror 2, a beam splitter 3, a monitoring energy meter 4, a polarizer assembly 5, a fixed attenuator assembly 6, a reference energy meter 7, a one-dimensional Platform, variable attenuator 8, beam expander 9 and computer 10. The variable attenuator 8 uses a femto-joule-level pulsed laser attenuation device with a continuously adjustable attenuation ratio disclosed in Chinese Patent Application 201210208446.4, and its attenuation control module is placed in the computer 10, that is, the computer 10 can call the attenuation control Module enables variable attenuator 8 to achieve 0.85×10 -4 Accurate transmittance of ~0.45.
[0017] Laser 1 is a linearly polarized pulsed laser with an output ...
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