Ultraviolet radiation ozone light cleaning machine

Abstract

The invention discloses an ultraviolet radiation and ozone cleaner comprising a housing and an upper cover. A lighting system, a conveying system, cooling systems and a multi-sensor control system are installed inside the housing. The lighting system comprises an intelligent addressable ultraviolet lamp ballast and an ultraviolet lamp. The intelligent addressable ultraviolet lamp ballast is connected with the ultraviolet lamps. The ultraviolet lamp comprises ultraviolet lamp tubes and an aluminum lamp holder having an IP address, wherein the ultraviolet lamp tubes are connected with the aluminum lamp holder having the IP address. The ballast is in multi-wire connection with the lamp holder, a first single-chip microcomputer and a second single-chip microcomputer are disposed inside the ballast and the lamp holder respectively, and accordingly the ballast can power the ultraviolet lamp and transmit information and application conditions of the ultraviolet lamp can be monitored in real time. The tracked conveying system allows workpieces to be conveyed more stably, and the workpieces can receive ultraviolet more evenly. The air cooling system and the water cooling system allow equipment to be better cooled.

Description

【Technical field】 [0001] The invention relates to the technical field of cleaning equipment, in particular to the technical field of ultraviolet cleaning machines. 【Background technique】 [0002] As we all know, in the process of producing and processing precision components of high-tech products, the surface cleanliness of workpieces (such as semiconductor integrated circuits, liquid crystal devices, surface wave devices, printed circuit boards and other high-density substrate components) is extremely demanding. The chemical cleaning in the traditional process can no longer meet the requirements. In recent years, ultraviolet radiation ozone light cleaning technology is being developed. [0003] The characteristics of ultraviolet radiation and ozone light cleaning are: the cleanliness after cleaning can reach the atomic level, and it can completely remove all kinds of organic substances adhered to the surface of the substrate by means of light and gas. It is a non-contact dr...

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Problems solved by technology

[0007] The purpose of the present invention is to solve the problems in the prior art, and propose an ultraviolet radiation ozone light cleaning machine, which can overcome the single function of the ballast, the ballast cannot supply power to the lamp cap and cannot realize the function of mutual transmission of lamp cap data, and at the same time It can solve the problems of uneven illumination and poor heat dissipation of the workpiece

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