Mask plate cleaning system

A cleaning system and mask technology, applied in the field of cleaning equipment, can solve problems such as the inability to effectively clean FineMask or mask, increase the production cost of OLED display screens, affect the quality of OLED display screens, etc., achieve continuous and automatic control, reduce Cleaning cost, effect of improving cleaning effect

Inactive Publication Date: 2013-12-25
唐军 +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Since the mask, especially the Fine Mask, has very strict requirements on accuracy, for example, the grid size error of the mask is generally required to be within 3 μm. Therefore, the current traditional cleaning equipment cannot be used to effectively clean the FineMask or the ma

Method used

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  • Mask plate cleaning system
  • Mask plate cleaning system
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[0023] The technical solutions of the present invention will be described in detail below with reference to the drawings and specific embodiments, so as to understand the essence of the present invention more clearly and intuitively.

[0024] Reference Figure 1 ~ Figure 3 As shown, the present embodiment provides a mask cleaning system 100, which is mainly used to clean organic light-emitting material residues attached to the surface of the mask 200 and particulate impurities at the evaporation holes provided on the mask 200. The mask cleaning system 100 includes a first cleaning device 1, a second cleaning device 2, a first rinsing device 3, and a drying device 4. The first cleaning device 1 is used to clean the particulate impurities at the evaporation hole, The second cleaning device 2 is used to clean organic luminescent material residues on the surface of the mask 200, the first rinse device 3 is used to rinse the mask 200, and the drying device 4 is used to dry the mask 20...

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Abstract

The invention relates to a mask plate cleaning system. The cleaning system comprises a first cleaning device, a second cleaning device, a first rinsing device and a drying device, which are sequentially connected in an adjacent manner, wherein the first cleaning device comprises an electrolytic cleaning device which is used for cleaning the mask plate to remove particle impurities; the second cleaning device comprises a low-temperature cleaning device which is provided with a cooling tube used for cooling a second cleaning solution. According to the cleaning system, different cleaning devices are adopted to clean different impurities according to different cleaning solutions, not only the cleaning effect is effectively improved, but also the cleaning solution loss is reduced, and accordingly, the cleaning solution utilization ratio is improved, and the cleaning cost is reduced.

Description

technical field [0001] The invention relates to the technical field of cleaning equipment, in particular to a mask plate cleaning system. Background technique [0002] Organic electroluminescent devices have many advantages such as self-luminescence, fast response time, wide viewing angle, low cost, simple manufacturing process, good resolution and high brightness, and are considered to be the emerging application technology of the next generation of flat-panel displays. In OLED (Organic Light-Emitting Diode, organic electroluminescent diode) technology, the mask used for vacuum evaporation is a very important and key component, and the quality of this component directly affects the quality and manufacturing cost of OLED products. [0003] Masks, especially fine masks with fine grids, will leave particles such as metal scraps in the grid or on the surface after initial processing, which will affect the normal use of the mask. In the process of recycling, impurities such as ...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24
Inventor 唐军田铬淇
Owner 唐军
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