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Miniature optical fiber Fabry-Perot pressure sensor and manufacturing method thereof

An optical fiber and Fab technology, applied in the field of micro-optical fiber Fabry-Perot pressure sensor structure, can solve the problem of high cost and achieve the effect of simple production, high precision and good reliability

Active Publication Date: 2014-01-22
广州烽鼎医疗科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the surface area of ​​the elastic diaphragm in the sensor structure provided by this solution is much larger than the cross-sectional area of ​​the optical fiber, and the cost is high

Method used

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  • Miniature optical fiber Fabry-Perot pressure sensor and manufacturing method thereof
  • Miniature optical fiber Fabry-Perot pressure sensor and manufacturing method thereof
  • Miniature optical fiber Fabry-Perot pressure sensor and manufacturing method thereof

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Embodiment Construction

[0030] The technical solutions provided by the present invention will be described in detail below in conjunction with specific examples. It should be understood that the following specific embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention.

[0031] Such as figure 1 As shown, the present invention provides a micro-optical fiber Fabry-Perot pressure sensor structure, which specifically includes a single crystal silicon film 1 and a borosilicate optical fiber 2, and the bottom surface of the single crystal silicon film 1 has a protruding Round platform (hereinafter referred to as the boss 3), the upper surface of the borosilicate optical fiber 2 has a concave cavity 4, and the lower surface of the single crystal silicon film 1 and the upper surface of the borosilicate optical fiber 2 are relatively connected by an electrostatic bonding process, obviously , the length of the concave cavity 4 needs to be ...

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Abstract

The invention discloses a novel miniature optical fiber Fabry-Perot pressure sensor and a manufacturing method thereof. According to the sensor, the defects that large light energy loss is caused because a traditional optical fiber Fabry-Perot sensor generates non-planar movement when a pressure sensitive film is pressed can be effectively overcome, and higher measurement accuracy can be obtained. The provided miniature optical fiber Fabry-Perot pressure sensor comprises a monocrystalline silicon film and a borosilicate optical fiber which are connected through an anodic bonding process, wherein the monocrystalline silicon film comprises a boss; the borosilicate optical fiber comprises a concave cavity; one side of the monocrystalline silicon film with the boss and the concave cavity of the borosilicate optical fiber relatively form a Fabry-Perot cavity; a reflecting surface is formed on the top of the boss. The sensor has the advantages that two reflecting surfaces of the Fabry-Perot cavity are always kept to be parallel to each other in the compressive deformation of the sensitive film, and the measurement accuracy is greatly improved.

Description

[0001] technical field [0002] The invention belongs to the technical field of optical fiber pressure sensors, and in particular relates to a novel structure of a miniature optical fiber Fabry-Perot pressure sensor and a manufacturing method of the sensor. [0003] Background technique [0004] Optical fiber sensing technology is a new technology developed rapidly in the late 1970s. It is the application of fiber optics in non-communication fields. Optical fiber sensing technology can measure more than one hundred kinds of physical quantities. Its advantages are: wide application range, high sensitivity, anti-electromagnetic interference, good insulation, corrosion resistance, flexibility, small size, low cost, and The compatibility of optical fiber transmission lines is good and so on. [0005] Optical fiber Fabry-Perot pressure sensor is a kind of optical fiber pressure sensor. It usually consists of a fiber end face and a diaphragm end face to form a Fabry-Perot mi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/24G01L11/02
Inventor 葛益娴王婷婷张闯冒晓莉
Owner 广州烽鼎医疗科技有限公司
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