Method for testing light transmittance performance of optical waveguide

Abstract

The invention discloses a method for testing the light transmittance performance of an optical waveguide on the basis of a scanning near-field optical microscope. The method is realized on the basis of a testing system which comprises a laser device, an optical waveguide device provided with the optical waveguide, a scanning and driving device, an input near-field optical fiber probe, an output near-field optical fiber probe, a signal generator, a phase-locking amplifier, a micro nano operation arm, detection equipment, a control box and a computer. The method comprises the steps as follows: firstly, the manufactured waveguide device is bonded on a sample box with an adhesive; then the accurate position of the optical waveguide is found through an electron microscope, the near-field optical fiber probes are moved to a certain position of the optical waveguide through the micro nano operation arm, and a light signal is introduced by the input near-field optical fiber probe; an output light signal is transmitted into detection equipment through the output near-field optical fiber probe; the optical waveguide is driven to be scanned point by point in the X-direction and the Y-direction through a scanning platform, so that a near-field optical image of the whole optical waveguide is obtained; and testing of an optical waveguide chip is completed. According to the method, the light transmittance performance of the optical waveguide device can be tested accurately.

Description

technical field [0001] The invention relates to the technical field of optical waveguide device testing, in particular to a method for testing the optical performance of an optical waveguide based on a scanning near-field optical microscope. Background technique [0002] Since the appearance of the optical microscope, people have been making unremitting efforts to improve the resolution of the microscope. Since the 18th century, the resolution of optical microscopes has not improved substantially, mainly due to the existence of a resolution limit determined by diffraction effects. Subsequently, scanning electron microscopes, scanning tunneling microscopes, etc. were proposed. Although the resolution of these microscopes has been amazingly improved, they have some fundamental weaknesses. For example, they have high requirements on the sample, and also have high requirements on the environment of the sample, so that the use of this type of microscope is limited. Therefore, p...

AI Technical Summary

Problems solved by technology

The sliding prism method needs to repeatedly slide the prism on the surface of the waveguide, which requires very complicated experimental skills and will cause damage to the surface of the waveguide

The prism coupling method requires a relatively long optical waveguide

Images