High-light effect light emitting diode chip and preparing method thereof
A light-emitting diode, high-efficiency technology, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of easy reflection, small critical angle of total reflection, and low light extraction efficiency of light-emitting diode chips.
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Embodiment 1
[0054] reference figure 1 , This embodiment provides a method for manufacturing a high luminous efficiency light emitting diode chip, including:
[0055] In step S10, a substrate 10 is provided.
[0056] In this embodiment, the substrate 10 may be a sapphire, silicon carbide, silicon or gallium nitride substrate.
[0057] In step S20, a GaN-based epitaxial wafer 20 is grown on the substrate 10. The GaN-based epitaxial wafer 20 includes an N-type GaN layer 21, a multiple quantum well layer 22, and a P-type GaN layer 23 that are sequentially grown upwardly on the substrate 10 (see Figure 1a ).
[0058] In this embodiment, the growth of the GaN-based epitaxial wafer 20 on the substrate 10 is achieved by the MOCVD (Metal-organic Chemical Vapor Deposition) method.
[0059] In step S30, a boss 20' for exposed part of the N-type GaN layer 21 is prepared on the GaN-based epitaxial wafer 20 (see Figure 1b ).
[0060] In this embodiment, a part of the upper surface of the GaN-based epitaxial waf...
Embodiment 2
[0134] See Figure 1f The present invention provides a high-efficiency light-emitting diode chip, comprising a substrate 10 and a GaN-based epitaxial wafer 20 grown on the substrate 10. The GaN-based epitaxial wafer 20 includes N-type GaN grown sequentially upward on the substrate 10 Layer 21, multiple quantum well layer 22, and P-type GaN layer 23. The surface of the GaN-based epitaxial wafer 20 is provided with a boss 20' that exposes part of the N-type GaN layer 21. A transparent conductive layer 30 is grown on the upper horizontal end surface 202' of the boss 20', and the transparent conductive layer 30 is provided with P electrode 42, a part of the lower horizontal end surface 201' of the boss 20' is provided with an array of convex or concave patterns 100b, and another part of the lower horizontal end surface 201' of the boss 20' is provided with N The electrode 41, the exposed part of the upper surface of the transparent conductive layer 30, the exposed part of the verti...
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