Device and method for preparing carbon nanotube

Abstract

The invention provides a device for preparing a carbon nanotube. The device comprises a reaction chamber, wherein one or more gas inlet tubes, a substrate bearing disc and one or more gas outlet tubes are arranged in the reaction chamber; a plurality of gas inlets are formed in each gas inlet tube; a plurality of gas outlets are formed in each gas outlet tube; the substrate bearing disc is positioned between the gas inlet tube and the gas outlet tube; each gas inlet tube and each gas outlet tube are detachably mounted in the reaction chamber. The gas inlet tube and the gas outlet tube in a chemical vapor deposition (CVD) reaction chamber for growth of the traditional carbon nanotube array are improved, so that the space distribution uniformity of a carbon source gas in the reaction chamber is greatly improved; a substrate is vertically or slantways placed on the substrate bearing disc in the reaction chamber of the device, so that the substrate is in contact with the carbon source gas in the growth process of the carbon nanotube array completely, and uniform growth of a plurality of carbon nanotube arrays is promoted. The device for preparing the carbon nanotube has an important promoting effect on batched preparation of the carbon nanotube arrays.

Description

technical field [0001] The invention relates to the field of nanomaterial manufacturing, in particular to a carbon nanotube preparation device and method. Background technique [0002] Carbon nanotube array materials are assembled from carbon nanotubes with a certain orientation, and have been proved to have excellent physical and chemical properties. The multi-sheet carbon nanotube array is prepared by simultaneously placing multiple pieces of catalyst substrates in the reaction chamber to make full use of the space of the reaction chamber, thereby increasing the output of the carbon nanotube array. However, the growth process of carbon nanotube arrays is a very complex thermocatalytic chemical vapor deposition process, which involves the flow and diffusion of carbon source gas. Compared with the growth environment of single-sheet carbon nanotube arrays, the influence of the carbon source gas diffusion problem is more obvious during the growth process of multi-sheet carbon...

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Problems solved by technology

[0003] The object of the present invention is to provide a carbon nanotube preparation device and method, which helps to solve the problem of uneven growth of multi-sheet carbon nanotube arrays

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