The invention discloses a preparation method of a built-in gas circuit of a
ceramic disc of an electrostatic chuck, and belongs to the technical field of electrostatic chucks. S2,
processing a positioning hole, a via hole and a DC hole in the
ceramic green sheet prepared in the above step through a
machining center; s3, filling conductive
metal slurry in the via hole, and printing a
metal electrode layer, a first Via Pad layer and a second Via Pad layer on the surface of the
ceramic green sheet in a
screen printing manner; s4, laminating to form an upper ceramic green compact block and a lower ceramic green compact block; s5, performing gas path
processing on the surface of the lower ceramic green compact block; s6, the upper ceramic green compact block and the lower ceramic green compact block subjected to gas circuit
machining are stacked together in a positioning and stacking mode, and a complete gas circuit is formed; s7,
degreasing and glue discharging are conducted on the upper ceramic green compact block and the lower ceramic green compact block, and the ceramic plate subjected to glue discharging is formed; s8, performing high-temperature
sintering to obtain ceramic; and S9, the
machining center machines the air outlet channel.