Method for Reducing Splash of Liquid Silicon During Electron Beam Melting of Polysilicon
An electron beam smelting, polysilicon technology, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve the problems of loss of silicon material, ablation of components, ablation of vacuum chamber shell, etc., to reduce the loss of silicon material , Avoid sudden pressure changes and reduce the effect of ablation
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Embodiment 1
[0026] 1. Material preparation: First, take 500g of polysilicon material, wash it 4 times with deionized water, put it in a drying oven and dry it at 60°C.
[0027] 2. Vacuumizing and pretreatment: Vacuum the electron beam melting furnace to 0.0018Pa with a vacuum pump group; water-cool the bottom of the water-cooled copper crucible, and maintain the temperature at 40°C; set the high voltage to 30kV, and after 5 minutes of high-pressure preheating, turn off the high pressure , the beam current of the electron gun is set to 200mA, and after the electron gun is warmed up for 10 minutes, the beam current of the electron gun is turned off.
[0028] 3. Adjust the beam spot movement of the electron beam: adjust the beam current of the electron gun to 100mA, measure with an infrared thermometer, and keep the surface temperature of the silicon material under the electron beam irradiation at 1420°C, then start heating to melt the silicon material.
[0029] Adjust the moving speed of th...
Embodiment 2
[0034] 1. Material preparation: First, take 500g of polysilicon material, wash it 4 times with deionized water, put it in a drying oven and dry it at 60°C.
[0035] 2. Vacuumizing and pretreatment: Vacuum the electron beam melting furnace to 0.0018Pa with a vacuum pump group; water-cool the bottom of the water-cooled copper crucible, and maintain the temperature at 40°C; set the high voltage to 30kV, and after 5 minutes of high-pressure preheating, turn off the high pressure , the beam current of the electron gun is set to 200mA, and after the electron gun is warmed up for 10 minutes, the beam current of the electron gun is turned off.
[0036] 3. Adjust the beam spot movement of the electron beam: adjust the beam current of the electron gun to 180mA, measure with an infrared thermometer, and keep the surface temperature of the silicon material under the electron beam irradiation at 1500°C, then start heating to melt the silicon material.
[0037] Adjust the moving speed of th...
Embodiment 3
[0042] 1. Material preparation: First, take 500g of polysilicon material, wash it 4 times with deionized water, put it in a drying oven and dry it at 60°C.
[0043] 2. Vacuumizing and pretreatment: Vacuum the electron beam melting furnace to 0.0018Pa with a vacuum pump group; water-cool the bottom of the water-cooled copper crucible, and maintain the temperature at 40°C; set the high voltage to 30kV, and after 5 minutes of high-pressure preheating, turn off the high pressure , the beam current of the electron gun is set to 200mA, and after the electron gun is warmed up for 10 minutes, the beam current of the electron gun is turned off.
[0044] 3. Adjust the beam spot movement of the electron beam: adjust the beam current of the electron gun to 150mA, measure with an infrared thermometer, and keep the surface temperature of the silicon material under the electron beam irradiation at 1470°C, then start heating to melt the silicon material.
[0045] Adjust the moving speed of th...
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