Positioner capable of rotating at multiple angles

Abstract

The invention discloses a positioner capable of rotating at multiple angles, and belongs to the technical field of optical device adjusting devices. The positioner capable of rotating at multiple angles can automatically control the rotation angle of an optical device. The positioner capable of rotating at multiple angles comprises a base, a driving assembly, a bearing, a hollow rotary body, a first connecting rod and a second connecting rod. The positioner capable of rotating at multiple angles is compact in size, large in light flux, accurate in positioning, high in repeatability, and capable of automatically controlling the light-permeable optical device to rotate.

Description

technical field [0001] The invention relates to the technical field of optical device adjustment devices, in particular to a multi-angle rotary positioner capable of automatically controlling the rotation angle of optical devices. Background technique [0002] In the application of optical detection equipment and instruments, it is sometimes necessary to automatically control the optical components in them to rotate to multiple different angles, thereby creating multiple different measurement conditions. For example, when using ellipsometry to measure the film thickness and reflectivity of a wafer, it is necessary to rotate the polarizer to 0°, 45°, 90° and 135° respectively. Such requirements often have strict requirements on the accuracy and repeatability of the rotation angle positioning. [0003] In the prior art, the automatic angle control of optical detection equipment and instruments can be realized by using stepper motors and servo motors as driving components. Fo...

AI Technical Summary

Problems solved by technology

For example, the GCD electronically controlled rotary table series of Daheng New Era Technology Co., Ltd. is driven by a two-phase stepping motor, and can realize the rotary motion of the rotary table with the worm gear drive. The disadvantage of this type of product is that it is bulky and heavy. The worm gear transmission with a large reduction ratio, the turntable speed is low, and the maximum speed is 3RPM

In addition, the DRTM series electric rotary table of OWIS company in Germany is driven by a stepping motor or a servo motor, and is driven by a synchronous belt to realize the rotary positioning of the rotary table. Larger, with obvious heat generation and low positioning accuracy

In addition, in the prior art, there is another method that omits the mechanical transmission link and uses a hollow shaft motor, such as the AH4K series 5-phase hollow shaft stepping motor of Autonics in South Korea, to directly connect the optical element to the hollow sh

Images