Multi-layer multi-chip fan-out structure and manufacturing method
A multi-chip and die technology, applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve problems such as chip shift and low alignment accuracy, and achieve optimized package size, compact package size, and low price Obvious effect
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[0042] The present invention will be further described below in conjunction with specific drawings and embodiments.
[0043] Such as Picture 11 Shown:
[0044] A multi-layer and multi-chip fan-out structure includes a carrier board 101 on which a plurality of stacked package sub-bodies are arranged; each package sub-body is encapsulated with at least one die 201; in each package sub-body One or more die 201 is covered by the dielectric material of the dielectric layer 103, and the die 201 is mounted on the metal pad 102 in a face-up manner; the dielectric layer 103 of each package sub-body is provided There is an RDL layer 104; the pad on the front side of the die 201 is electrically connected to the RDL layer 104 of the package sub-body where the die 201 is located through the first interconnection hole 202'.
[0045] An insulating layer 105 is provided between adjacent package sub-bodies, and the RDL layers 104 of adjacent package sub-bodies are electrically connected through th...
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