Microelectromechanical sound detection apparatus and method for producing such an apparatus

A detection device and micro-electromechanical technology, applied in microelectronic microstructure devices, measurement devices, electrical devices, etc., can solve the problems of expensive manufacturing, microphone damage, etc., and achieve reduced manufacturing costs, low costs, and reduced thickness. Effect
CN103609141AActive Publication Date: 2014-02-26ROBERT BOSCH GMBH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
ROBERT BOSCH GMBH
Publication Date
2014-02-26

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Abstract

The invention relates to a microelectromechanical sound detection apparatus, comprising a substrate, a housing, at least one opening for sound to pass through and a microelectromechanical element for picking up sound, wherein the housing is produced by means of moulding such as to provide a front volume and a rear volume for sound detection by means of the microelectromechanical element as cavities. The invention likewise relates to a method for producing a microelectromechanical sound detection apparatus and also to uses for a sound detection apparatus.
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Description

technical field

[0001] The invention relates to a microelectromechanical sound detection device, a method for manufacturing the microelectromechanical sound detection device, and the application of the microelectromechanical sound detection device. Background technique

[0002] Microelectromechanical sound detection devices are used, for example, in multimedia devices, mobile phones, digital cameras, bluetooth headsets or the like and in particular for picking up speech, for example during recording or during phone calls with a mobile phone.

[0003] It is already known to the applicant that, for microelectromechanical elements in the form of microphones for sound detection, first the corresponding microelectromechanical elements are mounted on a substrate by means of chip-on-board (COB) technology, electrically contacted and shielded with a cover plate. In order that the sound can now be detected by means of the microphone, the sound can hit the diaphragm of the microphone ...

Claims

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