Optical interferometer used for detecting inner arc surface of annular guide rail

Abstract

The invention discloses an optical interferometer used for detecting the inner arc surface of an annular guide rail. The inner arc surface is located on the inner side or the outer side in the circumferential direction of the annular guide rail, a condensation convex lens of the inner arc surface is located between a laser and a collimation convex lens, and the focus of the condensation convex lens and the focus of the collimation convex lens coincide; a beam splitter located between the condensation convex lens and the collimation convex lens is used for dividing light of an auto-collimation convex lens into a first light beam and a second light beam; a reference lens is located on one side, back to the beam splitter, of the collimation convex lens, the surface, facing the collimation convex lens, of the reference lens is a convex surface, and the surface, back to the convex surface, of the reference lens is a standard spherical surface; a conical reflector is located in the annular guide rail to be detected, and a rotary shaft of the conical reflector, the axis of the annular guide rail and the axis of the reference lens coincide. According to the optical interferometer, feature information of the inner arc surface in the whole stereoscopic annular guide rail can be obtained at a time, and test efficiency, accuracy and reliability are also greatly improved.

Description

technical field [0001] The invention relates to an optical detection device, in particular to an optical interferometer for detecting the inner arc surface of a ring guide rail. Background technique [0002] Optical interference technology is one of the most precise and effective testing technologies in modern times. It integrates the latest contemporary technologies, widely adopts the latest achievements in computer technology, laser technology, electronic technology, semiconductor technology and other fields, and can quickly and accurately complete the inspection of optical parts. Check with the system. In today's optical workshop, from the design, processing and inspection of optical parts to the assembly, calibration and testing of optical systems, interferometers have become an essential testing and inspection device that is easy to operate, reliable, high-precision, and intelligent. It plays an inestimable role in the mass production and inspection of optical componen...

AI Technical Summary

Problems solved by technology

[0003] However, existing interferometers often detect deviations in surface shape, such as curved or partially curved or concave-convex areas. For the detection of three-dimensional surface shape, repeated inspections are required, and all three-dimensional surface shapes cannot be obtained at one time; secondly, The detection accuracy and reliability of existing interferometers are easily affected by environmental factors such as external vibration, temperature, and airflow

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