Combined system of super-resolution confocal optical microscope and secondary ion mass spectroscopy

Abstract

The invention discloses a combined system of a super-resolution confocal optical microscope and a secondary ion mass spectroscopy. According to the combined system, laser output by a laser device a is filtered by a dichroic optical filter a and is converged to a microscope objective; laser output by a laser device b is filtered by a phase plate and a dichroic optical filter b in sequence and then is converged to the microscope objective; the laser converged by the microscope objective irradiates a sample platform to obtain a fluorescence signal of a sample to be detected; the laser is converged by the microscope objective, is collected by a collection lens a, and then is emitted into a photoelectric detector; a photoelectric signal output by the photoelectric detector is input to an optical signal acquisition device; the sample to be detected is bombarded by an ion beam generator to obtain secondary ions; after passing through a pull-out electrode to obtain kinetic energy, the secondary ions are screened by an ion gate and are detected by a reflection detector; a signal output by the reflection detector is input into an SIMS (Secondary Ion Mass Spectroscopy) signal acquisition device; the ion beam generator and the sample platform are connected with a displacement controller. According to the combined system, SIMS imaging and analysis are guided by super-resolution optical imaging; the resolution of the super-resolution confocal optical microscope can be close to that of the SIMS so that the high-precision target spot positioning can be realized.

Description

technical field [0001] The invention relates to a super-resolution confocal optical microscope coupled with a secondary ion mass spectrometer, belonging to the field of scanning microscopic imaging. Background technique [0002] In the field of material science, a large number of research results have shown that the size effect, quantum effect, and surface effect of matter at the nanoscale make nanomaterials and nanodevices exhibit excellent performance. Only by studying the physical and chemical processes of surfaces and interfaces in nano-functional devices at the nanometer scale, as well as the changes in the molecular structure and properties of different surfaces and interfaces, and understanding the working mechanism of nano-functional devices, can the scientific goal of artificially designing and preparing nano-devices with specific properties be realized. . [0003] This is especially true in the study of biochemical reactions and biomolecular structures and propert...

AI Technical Summary

Problems solved by technology

However, due to the limitation of the optical diffraction limit, the spatial resolution of the existing laser confocal microscope can only reach 250nm ~ 300nm, it is difficult to realize nanoscale optical imaging in complex systems, and the guidance and positioning of SIMS ion beams is not accurate enough.

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