Method for cleaning tool for manufacturing cathode of low-light-level image intensifier

Abstract

The invention discloses a method for cleaning a tool for manufacturing a cathode of a low-light-level image intensifier. The method for cleaning the tool for manufacturing the cathode of the low-light-level image intensifier is mainly used for cleaning the surface of the ceramic portion of a binding post of an antimony alkali base and the surface of the ceramic portion of a binding post of a single-tube base, wherein the antimony alkali base and the single-tube base are used when the photocathode of the low-light-level image intensifier is manufactured. According to the technical scheme of the method for cleaning the tool for manufacturing the cathode of the low-light-level image intensifier, a comprehensive method combining plasma cleaning and ultrasonic cleaning is adopted, and the technological process of the method for cleaning the tool for manufacturing the cathode of the low-light-level image intensifier includes the preparation step before cleaning, the deionized water ultrasonic cleaning step, the deionized water flushing step, the alcohol ultrasonic cleaning step, the drying step, the workpiece installation step, the argon pressure and oxygen pressure adjustment step, the plasma cleaning step, the termination procedure step and the inspection step. After the method for cleaning the tool for manufacturing the cathode of the low-light-level image intensifier is tried out, compared with an existing cleaning method, cleaning efficiency is improved by more than 10 times, the cost is reduced by 80%, environmental pollution is avoided, the yield of the manufactured cathodes of the low-light-level image intensifiers basically reaches 100%, and the requirement for mass production is completely met.

Description

technical field [0001] The invention relates to a method for cleaning the surface of a tool used in the manufacture of an electric vacuum device, which is mainly used for cleaning the surface of the antimony alkali seat and the ceramic part of a single tube seat terminal used in the manufacture of a low-light image intensifier photocathode. It can also be used for surface cleaning of similar ceramic parts in electric vacuum devices. Background technique [0002] Vacuum optoelectronic devices represented by low-light image intensifiers are widely used in national defense, scientific research and other industries, and are widely valued at home and abroad. The low-light image intensifier is mainly composed of an input window, a photocathode, a micro-channel plate, a fluorescent screen, and an output window. Its working principle: Under low illumination at night, the scene image that cannot be directly seen by the human eye is converted into a corresponding photoelectron image ...

AI Technical Summary

Problems solved by technology

[0007] points out the defects of the cleaning method, and develops a comprehensive method combining plasma cleaning and ultrasonic cleaning to replace the original cleaning method,Fundamentally overcome the phenomenon that some small grooves of the antimony base and single tube base are not easy to clean, the quality of the photocathode is difficult to guarantee, and the phenomenon of low work efficiency, to effectively improve the ceramic terminal Excellent insulation performance, prolonging the service life of antimony alkali base and single tube base, improving efficiency, and fully meeting the needs of mass production of low-light image intensifiers

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