Method of Eliminating System Error in Wave Aberration Detection of Grating Shearing Interferometer
A technology of shearing interferometer and system error, applied in the direction of testing optical performance, etc., can solve the problems of increasing the difficulty of wave aberration detection, the difficulty of grating positioning and system alignment, and the large error of detector tilt
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0121] The present invention will be further described below in conjunction with the examples and drawings, but the examples should not limit the protection scope of the present invention.
[0122] see first figure 1 , figure 1 It is the optical path diagram of the grating shear wave aberration detection interferometer of the present invention. It can be seen from the figure that the grating shear wave aberration detection interferometer of the present invention includes a light source 1, along which the light beam propagation direction of the light source 1 is successively a focusing mirror 2, a small filter Hole 3, diffraction grating plate 5, grating displacement stage 6, aperture plate 7, aperture alignment displacement stage 8 and two-dimensional photoelectric sensor 9; described diffraction grating plate 5 is placed on grating displacement stage 6, and described The aperture plate 7 is placed on the aperture alignment displacement stage 8; the optical system to be measu...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com