High-efficiency PID (Potential Included Degradation) Free solar single crystal silicon cell passivation antireflection film
A single crystal silicon cell, passivation reduction technology, applied in the field of solar cells, can solve the problems of slow PID decay speed, reduced conversion efficiency of crystalline silicon cells, PID decay, etc., to reduce PID decay, reduce the overall refractive index, prevent Ineffective effect
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[0015] The preparation method of the passivation anti-reflection film of the monocrystalline silicon cell comprises the following steps:
[0016] a. Pretreatment of the original silicon wafer, the pretreatment includes texturing, diffusion and etching processes in the traditional battery process;
[0017] b. Use PECVD equipment to coat the passivation anti-reflection film on the diffusion surface, and the bottom layer is SiO 2 Layer 1, the middle layer is a high refractive index passivation SiNx layer 2, and the top layer is an electrical property optimized SiNx layer 3;
[0018] c. Use the traditional battery printing process to print the back electrode, aluminum back field, positive grid line and positive electrode, and sinter to form a good ohmic contact.
[0019] The existing passivation anti-reflection film for solar monocrystalline silicon cells generally adopts a SiNx layer with a refractive index of 2.03 and a thickness of 80Nnm. At this time, the conversion efficienc...
Embodiment 1
[0022] Bottom layer is SiO 2 Layer 1 with a refractive index of 1.45 and a thickness of 20nm, the middle layer is a high refractive index passivated SiNx layer 2 with a refractive index of 2.20 and a thickness of 40nm, and the top layer is an electrically optimized SiNx layer 3 with a refractive index of 2.00 and a thickness of 20nm , at this time the conversion efficiency is 19.05%, and the attenuation value is 3.5%.
Embodiment 2
[0024] Bottom layer is SiO 2 Layer 1 with a refractive index of 1.58 and a thickness of 20nm, the middle layer is a high refractive index passivated SiNx layer 2 with a refractive index of 2.30 and a thickness of 25nm, and the top layer is an electrically optimized SiNx layer 3 with a refractive index of 2.05 and a thickness of 50nm , at this time the conversion efficiency is 18.90%, and the attenuation value is 0.8%.
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