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Diffusion furnace exhaust gas collection device

A technology of exhaust gas collection and diffusion furnace, applied in the field of solar cells, can solve problems such as poor cooling effect of residual liquid tank, and achieve the effects of reducing pollution and harm to human body, increasing residence time, and reducing content

Active Publication Date: 2016-03-16
YINGLI GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention aims to provide a diffusion furnace exhaust gas collection device to solve the problem of poor cooling effect of the raffinate tank in the prior art

Method used

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  • Diffusion furnace exhaust gas collection device
  • Diffusion furnace exhaust gas collection device
  • Diffusion furnace exhaust gas collection device

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Embodiment Construction

[0028] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0029] like figure 2 and image 3 As shown, the exhaust gas collection device of the diffusion furnace in this embodiment includes a housing 10 and a barrier 20 . The housing 10 includes an inner cavity and an air inlet 11 and an exhaust port 12 communicating with the inner cavity. Barriers 20 are arranged in the inner cavity, and are formed between adjacent barriers 20 and / or between the barriers 20 and the inner wall of the housing 10. There is an air flow passage connecting the air inlet 11 and the air outlet 12 .

[0030] Using the diffusion furnace tail gas collection device of this embodiment, a barrier wall 20 is added in the casing 10 . When the exhaust gas needs to enter the casin...

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Abstract

The invention provides a diffusion furnace exhaust gas collection device. The diffusion furnace exhaust gas collection device comprises a shell body (10), wherein the shell body (10) comprises an internal chamber, and a gas inlet (11) and an exhaust opening (12) which are communicated with the internal chamber. The diffusion furnace exhaust gas collection device further comprises barrier walls (20), wherein the barrier walls (20) are arranged in the internal chamber, and gas flow passages, which are communicated with the gas inlet (11) and the exhaust opening (12), are formed among adjacent barrier walls (20) and / or between the barrier walls (20) and the internal wall of the shell body (10). The diffusion furnace exhaust gas collection device provided by the technical scheme of the invention has the advantage that the problem in the prior art that the residual liquid tank cooling effect is poor is effectively solved.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a diffusion furnace tail gas collection device. Background technique [0002] In the field of semiconductor manufacturing or solar cells, the more commonly used diffusion equipment in the diffusion process is the diffusion furnace. The process gas in the diffusion process generally refers to oxygen, nitrogen, and source gases (such as phosphorus oxychloride, boron tribromide, etc.). After the process gas undergoes a chemical reaction in the diffusion furnace tube, the exhaust gas (residual process gas and gas produced after the reaction) discharged from the diffusion furnace tube is called tail gas. like figure 1 As shown, the exhaust gas treatment device of the diffusion furnace includes a raffinate tank 2, an exhaust pipeline 3 and an exhaust fan 4. The raffinate tank 2 is arranged between the diffusion furnace 1 and the exhaust pipeline 3, and the raffinate tank 2 serves ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L21/228
CPCC30B31/16Y02P70/50
Inventor 王英超郎芳李高非史金超
Owner YINGLI GRP