Measurement system and measurement method for secondary electron emission coefficient of medium film

A technology of secondary electron emission and dielectric thin film, applied in the field of electronic science, can solve the problems of complex measurement method, high cost, complex measurement device, etc., and achieve the effect of simple measurement method, low cost, and elimination of positive charges

Inactive Publication Date: 2014-04-09
XI AN JIAOTONG UNIV
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Problems solved by technology

These factors make the whole measurement device very complicated, the cost is high, and the measurement method is also complicated

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  • Measurement system and measurement method for secondary electron emission coefficient of medium film
  • Measurement system and measurement method for secondary electron emission coefficient of medium film

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Embodiment Construction

[0029] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0030] like figure 1 As shown, the present invention provides a measurement system for the secondary electron emission coefficient of a dielectric thin film, comprising: an electron gun 1, a barrel-shaped collector 2, a sample holder 3, and a total power supply 4, wherein the electron gun 1, the barrel-shaped collector 2. The sample holder 3 is set in a vacuum chamber, the vacuum degree of the vacuum chamber is high vacuum, and the vacuum pressure of the vacuum chamber is less than 3×10-3Pa; the total power supply 4 is a DC high voltage stabilized power supply. The top of the barrel-shaped collector 2 in the vacuum chamber is provided with a round hole, the sample holder 3 is arranged in the barrel-shaped collector 2, the electron gun 1 is arranged outside the barrel-shaped collector 2, the sample holder 3, the round hole, and the emitting end of the electron gun 1 ...

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Abstract

The invention discloses a measurement system and a measurement method for a secondary electron emission coefficient of a medium film. The system comprises an electronic gun, a barrel-shaped collection electrode, a sample holder and a general power. A round hole is arranged at the top of the barrel-shaped collection electrode. The sample holder is arranged in the barrel-shaped collection electrode. The electronic gun is arranged outside the barrel-shaped collection electrode. The sample holder, the round hole and the emission end of the electronic gun are in the same straight line. The sample holder is connected with the grounding terminal of the general power through a first resistor. The electronic gun is connected with the negative electrode of the general power. The barrel-shaped collection electrode is connected with a first power supply and a second power supply which have opposite positive and negative electrodes. Change-over switches are connected with the other ends of the first power supply and the second power supply. The change-over switches are connected with the grounding terminal of the general power through a second resistor. In the method, only one electronic gun and one collection electrode are needed, a secondary electron emission coefficient of a sample can be tested, the measuring cycle is shortened, and the efficiency is raised. The measurement system has a simple structure and low cost.

Description

technical field [0001] The invention belongs to the field of electronic science and technology, and in particular relates to a measurement system and a measurement method for the secondary electron emission coefficient of a dielectric thin film. Background technique [0002] When measuring the secondary electron emission coefficient (SEY) of a dielectric material, the surface of the dielectric material is charged during the measurement process due to the poor conductivity of the dielectric material. The charging phenomenon causes the surface potential of the sample to change, making the measurement of the secondary electron emission coefficient of the material inaccurate or even impossible to measure. In the existing methods for measuring the secondary electron emission coefficient of dielectric materials, in order to eliminate the charging phenomenon of the material, in the early days, people used the single-pulse electron gun method for measurement. In the single-pulse me...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/22
Inventor 翁明曹猛张海波
Owner XI AN JIAOTONG UNIV
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