Smart vibration isolator for micro-vibration control

Abstract

The invention proposes a smart vibration isolator for micro-vibration control. The smart vibration isolator for micro-vibration control comprises a housing 1, a magnetorheological elastomer 2, a force output rod 3, a sliding bearing 4, a cover board 5, a magnetic mass block 6, a piezoelectric ceramic pile 7, a pressing bolt 8, a connection base 9, a steel ball 10 and a coil 11. The smart vibration isolator adopts a cascade form of the magnetorheological elastomer and the piezoelectric ceramic pile, selects working states of the piezoelectric ceramic pile and the magnetorheological elastomer by switching control according to the excitation frequency, and achieves semi-active / full-active two-stage vibration isolation of vibration. By adopting the smart vibration isolator for micro-vibration control, the advantages of the stability, the controllability, good dynamic characteristics and large output force of the piezoelectric ceramic pile vibration isolator are considered, effective attenuation of micro-vibration of full-frequency bands including ultralow frequency can be achieved, the problem of vibration caused by uncertain stimulation of precision machining is solved, and meanwhile, the volume and the quality of the vibration isolator are reduced.

Description

technical field [0001] The invention relates to vibration control technology, in particular to a device for vibration suppression of micro-vibration in the precision machining process. Background technique [0002] The adverse effects of micro-vibration on precision machining and precision measurement have become increasingly prominent, and have received extensive attention in recent years. Although its vibration displacement is quite small, on the order of microns, and its acceleration is on the order of millimeters per square second, the micro-vibration is enough to have a very serious impact on the work of precision machining and vibration-sensitive products. For example, the key equipment for integrated circuit manufacturing - the minimum lithography line width of the lithography machine is restricted by the vibration state of the exposure machine lens and the workpiece table, resulting in the resolution cannot be improved; the resolution of electron microscope precision...

AI Technical Summary

Problems solved by technology

[0003] The existing micro-vibration control mainly adopts passive vibration isolation technology (such as rubber, air cushion and other materials), which has a good isolation effect on high-frequency interference, but has a large structure and poor low-frequency suppression effect; active vibration isolation (such as piezoelectric actuators) ) has an obvious control effect on low-frequency interference, but it consumes a lot of energy, has poor stability, and the high-frequency suppression effect is not ideal

Due to the interference of various frequencies in the precision machining platform environment, the ideal micro-vibration suppression effect cannot be obtained by using the existing micro-vibration control methods

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